Vapor emission device, organic thin-film vapor deposition apparatus and method of organic thin-film vapor deposition
An organic evaporation and vapor technology, applied in lighting devices, vacuum evaporation coating, electrical components, etc., can solve the problems of decomposition, inefficient use of evaporation materials, and deterioration of evaporation materials over time, to prevent deterioration and decomposition over time, The effect of preventing deformation of the mask and reducing the amount of heat transfer
Active Publication Date: 2010-08-11
ULVAC INC
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Problems solved by technology
[0003] However, such an evaporation source using a linear container needs to continuously evaporate a large amount of organic material, which leads to problems such as a decrease in the use efficiency of the evaporation material and deterioration and decomposition of the evaporation material over time.
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[0044] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0045] figure 1 is a schematic perspective view showing the main part of the organic thin film vapor deposition apparatus of this embodiment, figure 2 is a cross-sectional view showing the internal configuration of the main part of the same organic thin film vapor deposition apparatus, image 3 It is an explanatory plan view showing the relationship between the discharge port of the discharge part of the same organic thin film vapor deposition device and the vapor passage hole of the cooling device, Figure 4 It is a cross-sectional explanatory view showing the vapor deposition operation of the same organic thin film vapor deposition device.
[0046] Such as figure 1 with figure 2 As shown, the organic thin film vapor deposition device 1 of this embodiment has a vacuum tank 2 and a steam supply part 3. The vacuum tank 2 has a steam release device 10 conn...
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A technology for organic material vapor deposition that would realize enhancing of the efficiency of evaporation material use, prevention of any aging deterioration of evaporation material and assured prevention of any mask deformation by heat at vapor deposition. There is disclosed an organic material evaporation source comprising a shower-plate-shaped emission section (11) provided in its surface with an arrangement of multiple emission orifices (12); disposed within the emission section (11), a supply tube (14) for emitting the vapor of introduced organic evaporation material through a blowout orifice (15) toward the bottom part (11a) of the emission section (11) to thereby attain supply into the emission section (11); and cooling means (17) disposed at at least a region on the emission orifices (12) side of the emission section (11). The cooling means (17) is provided so as, for example, to cover the whole of the emission section (11) and has vapor passage holes (17a) for passage of the vapor of the organic evaporation material provided at the regions thereof corresponding to the emission orifices (12) of the emission section (11).
Description
technical field [0001] The present invention relates to an organic thin film vapor deposition technique for forming, for example, a light emitting layer of an organic EL element. Background technique [0002] Conventionally, in order to form the light-emitting layer of an organic EL element, a vacuum vapor deposition apparatus is used. In such a vacuum evaporation apparatus, in order to efficiently vapor-deposit a plurality of substrates, an evaporation source has been proposed in which evaporation ports are arranged linearly along a long evaporation container, and the container is oriented horizontally. direction. [0003] However, such an evaporation source using a linear container needs to continuously evaporate a large amount of organic material, which leads to problems such as a decrease in the use efficiency of the evaporation material and deterioration and decomposition of the evaporation material over time. [0004] On the other hand, a shower plate type evaporatio...
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IPC IPC(8): H05B33/10C23C14/12H01L51/50
CPCH01L51/0011C23C14/12C23C14/228C23C14/243H10K71/166
Inventor 根岸敏夫越田达彦
Owner ULVAC INC