Support mechanism and automatic lifting device with the mechanism

Abstract

The invention discloses a supporting mechanism, which comprises a mounting plate, a bearing plate, a connecting piece and a limiting piece, the connecting piece and the limiting piece are connected between the installing plate and the bearing plate in parallel with each other, and the connecting piece includes a connecting column and an elastic The upper end of the connecting column is movably connected with the bearing plate, the lower end of the connecting column is movably connected with the mounting plate, the elastic element is sleeved outside the connecting column in a compressed form, and the upper end of the elastic element is in conflict with the bearing plate, and the lower end of the elastic element is in contact with the loading plate. The mounting plate conflicts, the lower end of the spacer is connected to the mounting plate, the upper end of the spacer extends along the direction of the load plate, and the upper end of the spacer is also provided with a soft cushion; The hard mechanical contact between the bearing plate and the loaded object prevents the loaded object from being damaged, and the structure is simple and easy to maintain. In addition, the invention also discloses an automatic lifting device with the support mechanism of the invention.

Description

technical field [0001] The invention relates to a support mechanism, in particular to a support mechanism with a buffer function for supporting flat-plate devices and an automatic lifting device with the support mechanism. Background technique [0002] Flat panel display (FPD, Flat Panel Display) will become the mainstream product in the display due to its advantages of thinness, lightness, low power consumption, and low radiation. The flat panel display mainly includes liquid crystal display LCD (Liquid Crystal Display), plasma display PDP (Plasma Display Panel ), organic electroluminescent display OLED (Organic Light Emitting Display) and surface conduction electron emission display SED (Surface-conduction Electron-emitter Display) and other major technology types; the production of various types of display devices requires the use of glass as substrates Carry out vacuum coating, and deposit multi-layer thin films successively on the glass substrate. Taking OLED as an exam...

AI Technical Summary

Problems solved by technology

[0003] The existing support mechanism for supporting and lifting the substrate does not have the function of buffering and vibration reduction. The support mechanism directly touches the substrate. During the process of supporting and lifting the substrate, hard mechanical contact is likely to cause it to be supported and / or The lifted substrate is damaged, which reduces the yield of products; another support mechanism has the function of air pressure damping or hydraulic damping. In the plating equipment, this inevitably brings pollution from the equipment itself to the vacuum environment, reduces the cleanliness of the vacuum equipment, and affects the evaporation effect; at the same time, the introduction of vacuum equipment such as air cylinders or hydraulic cylinders makes the structure of the support mechanism complex, Difficult to install and high manufacturing cost, while the support mechanism is located in the vacuum equipment and difficult to maintain

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