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Film thermocouple and manufacturing method thereof

A technology of thermocouple and thin film, which is applied in the direction of directly heat-sensitive electrical/magnetic element thermometers, measuring heat, and using electrical devices, etc., which can solve the problem of poor reliability and low measurement accuracy of non-metallic surface temperature measurement. problems, to avoid floating or falling off problems, high measurement accuracy and high reliability

Inactive Publication Date: 2010-09-01
CHINA AIRPLANT STRENGTH RES INST
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Problems solved by technology

[0005] Purpose of the present invention: In order to solve the problem of poor reliability and low measurement accuracy of the surface temperature measurement of non-metallic structures in the prior art, the present invention provides a temperature measurement process that is not prone to floating and falling off, and has better reliability. Thin film thermocouple with high precision

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  • Film thermocouple and manufacturing method thereof
  • Film thermocouple and manufacturing method thereof
  • Film thermocouple and manufacturing method thereof

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Embodiment Construction

[0023] The present invention will be described in further detail below by means of specific embodiments:

[0024] see figure 2 , which is a structural schematic diagram of the first embodiment of the thin film thermocouple of the present invention. The thin film thermocouple includes a thermal electrode A4, a thermal electrode B5 and a pair of lead wires 6. Wherein, the thermode A4 and the thermode B5 are two kinds of standard thermode materials, which are directly formed on the surface of the member 3 to be measured by means of vacuum ion sputtering. Moreover, the thermal electrode A4 and the thermal electrode B5 are connected to each other to form a thermocouple, and the junctions overlap and are in close contact, and the junction point of the two is the temperature measurement point 1 . At the same time, the lead wires 6 are led out from the thermal electrode A4 and the thermal electrode B5 respectively. In actual measurement, generally zero degrees is used as a referen...

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Abstract

The invention belongs to the technical field of temperature measurement and in particular relates to a film thermocouple and a manufacturing method thereof. The film thermocouple comprises a thermode A, a thermode B and a connecting lead, wherein a junction of the thermode A and the thermode B is a temperature measuring point; the connecting lead is led out of the thermode A and the thermode B respectively; and the thermode A and the thermode B are molded on a surface of a member to be measured in a mode of vacuum ion sputtering. In addition, the invention also provides the manufacturing method for the film thermocouple. The thermode A and the thermode B which form the thermocouple are generated by directly sputtering on the surface of the member to be measured in the mode of vacuum ion sputtering, so the thermocouple is fixedly and reliably connected with the member to be measured, and is difficult to float and fall, and measurement accuracy is high.

Description

technical field [0001] The invention belongs to the technical field of temperature measurement, and in particular relates to a thin-film thermocouple and a manufacturing method thereof. Background technique [0002] A thermocouple is a sensitive element of a thermoelectric thermometer, and its temperature measurement principle is based on the thermoelectric effect discovered by Seebeck in 1821. see figure 1 , which is a schematic diagram of the principle of thermocouple temperature measurement. In the figure, two different conductors A and B are connected together to form a closed loop, and the two connected points between conductor A and conductor B are temperature measurement point 1 and reference point 2 respectively. Among them, conductors A and B are called thermodes, temperature measuring point 1 is usually welded together, placed in the temperature measuring field to feel the measured temperature during measurement, and reference point 2 keeps the temperature consta...

Claims

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Application Information

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IPC IPC(8): G01K7/04C23C14/34C23C14/04
Inventor 郝庆瑞成竹
Owner CHINA AIRPLANT STRENGTH RES INST
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