Starting method of reduction furnace under polysilicon hydrogen atmosphere
A technology of polycrystalline silicon and reduction furnace, which is applied in the fields of polycrystalline material growth, chemical instruments and methods, silicon, etc., can solve the problems of difficulty in control, shorten furnace start-up time, and high cost, reduce equipment investment and improve the success rate of furnace start-up. , the effect of shortening the start-up time
Inactive Publication Date: 2010-10-20
峨嵋半导体材料研究所
View PDF3 Cites 2 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0005] The purpose of the present invention is to solve the problems of complex operation process, difficult control or high cost existing in the existing polysilicon reduction furnace start-up method under hydrogen atmosphere, and to provide an improved polysilicon reduction furnace start-up method, which adopts breakdown two-phase baking- Compared with the three-phase breakdown method, the cost is lower than that of the three-phase breakdown method. Compared with the preheater breakdown method, the furnace start-up time is shortened and the success rate of the furnace start-up is improved.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0020] The present invention will be further described below in combination with specific embodiments and accompanying drawings.
[0021] The method for starting a polysilicon reduction furnace of the present invention mainly consists of arranging multiple groups of polysilicons composed of multiple pairs of silicon cores into a figure 2 The two inner and outer rings are shown, the inner ring is connected to one phase power supply, and half of the outer ring is connected to the other phase power supply. The two sets of polysilicon are broken down by these two phases of power supply, and then the broken down polysilicon is baked Polysilicon on the other half of the outer ring.
[0022] To implement this method, the figure 1 circuit structure.
[0023] The starting circuit of the reduction furnace under the hydrogen atmosphere includes figure 1 , figure 2 The upper and lower high-voltage transformers shown in the figure, and multiple groups of silicon cores such as ima...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses a polysilicon reduction furnace starting method, relating to a starting method of a reduction furnace under a polysilicon hydrogen atmosphere and aiming to solve the problems of complex operation process, difficult control and high cost of the traditional starting method of the reduction furnace under the polysilicon hydrogen atmosphere. In the method, a plurality of sets of polysilicons respectively formed by a plurality of pairs of silica cores are mainly arranged into an inner ring and an outer ring, wherein one phase power supply accesses the inner ring, the other phase power supply accesses the outer ring, the two sets of polysilicons are broken through the two phase power supplies, and then the other half polysilicons of the outer ring are roasted by the broken polysilicons.
Description
technical field [0001] The invention relates to the technical field of reduction of polysilicon, in particular to a method for starting a reduction furnace of polysilicon in a hydrogen atmosphere. Background technique [0002] At present, most polysilicon reduction furnaces in China are started by baking in a nitrogen atmosphere. This starting method has a high safety factor, but the success rate of starting the furnace is low and the start-up time is long. The biggest disadvantage is that it is easy to produce oxidized interlayers and produce polysilicon. scrap. [0003] The one provided by the German MSA company starts under a nitrogen atmosphere. The silicon core is broken down by the heat of the pre-heater halogen lamp, and then poured into the subsequent electrical equipment and then the pre-heater is taken out. The operation process is complicated and difficult to control. [0004] Some domestic companies use high pressure to use three-phase breakdown in a hydrogen at...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More IPC IPC(8): C01B33/03C30B29/06
Inventor 陈强赵仕明殷沛光胡乐沙翟贵林雷建明
Owner 峨嵋半导体材料研究所