Temperature control system and method thereof

A technology of temperature control system and temperature control method, applied in temperature control, control/regulation system, non-electric variable control, etc., can solve the problems of narrow applicable function range, inability to update in time, poor scalability, etc., and achieve clear module functions. , The effect of reasonable level and convenient operation

Inactive Publication Date: 2010-11-24
BEIJING SEVENSTAR ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this type of temperature controller is not specially set for the vertical furnace process, its applicable function range is narrow, its cost is high and its scalability is poor, and it cannot be updated in time with the update of process requirements.

Method used

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  • Temperature control system and method thereof
  • Temperature control system and method thereof
  • Temperature control system and method thereof

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Embodiment Construction

[0037] The temperature control system and method proposed by the present invention are described in detail as follows in conjunction with the accompanying drawings and embodiments.

[0038] According to one embodiment of the present invention, the temperature control system and method are applied to the temperature control of the vertical furnace process, such as figure 1 As shown, the system includes: a temperature sensing module 1, which is used to sense the temperature of the temperature measuring point, and sends the sensed temperature signal to the signal acquisition module; a signal acquisition module 2, which is connected with the temperature sensing module The temperature signal of the temperature module 1 is converted into temperature data and then sent to a programmable logic controller (Programmable Logic Controller, PLC) 3; the programmable logic controller 3 transmits the temperature data sent by the signal acquisition module 2 to a network connected to it through ...

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Abstract

The invention relates to a temperature control system and a method thereof. In the system, a temperature signal sensed by a temperature sensing module is filtered, amplified and converted into temperature data through a signal acquisition module, and is sent into a PLC; the PLC is communicated with a control module through network to transmit the temperature data; the control module compensates the temperature data of each sampling channel to acquire the actual temperature value of each temperature sensing point, combines with temperature to control target track data and the actual temperature value, and generates a control command by combining a set control mode and a control parameter; after the control command is sent to the PLC through data flow from the top to the bottom, the control command is converted into a signal which can be received by a control signal output module by the PLC; and the control signal output module drives a transformer to output corresponding heating power. The system and the method have the advantages of strong pertinence, high control accuracy and wide application range.

Description

technical field [0001] The invention relates to the technical field of temperature control of semiconductor process heaters, in particular to a vertical furnace temperature control system and method. Background technique [0002] Silicon wafer is an important semiconductor material, and its processing technology, especially the oxidation process, is a process that requires very high temperature control methods. At present, most of the silicon wafer oxidation furnaces designed in China are horizontal structures. Vertical furnaces with a higher degree of automation have been widely used in the world to process silicon wafers. In order to provide a stable and reliable temperature field control system, in the past, common temperature control instruments on the market were used as temperature control devices for horizontal furnaces or vertical furnaces. However, this type of temperature controller is not specially set for the vertical furnace process, its applicable function ra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D23/22
Inventor 徐冬张海轮陈亚周法福
Owner BEIJING SEVENSTAR ELECTRONICS CO LTD
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