Semiconductor laser device
By designing wavelength-dependent photodiodes and optimizing the dielectric multilayer film structure in semiconductor laser devices, the problem of monitoring current fluctuations caused by laser wavelength changes in traditional semiconductor laser devices when the ambient temperature changes is solved, and automatic power control (APC) is realized. The specification of the driver ensures a response to power changes within ±5%.
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[0033] figure 1 It is a sectional view of the main part of the semiconductor laser device of the present invention. Semiconductor laser device 10 comprises pedestal (stem) 20, sub-mount (sub-mount) 30, semiconductor laser chip 100 and photodiode 40; On the horizontal plane, the semiconductor laser chip 100 is placed on the submount 30 , and the photodiode 40 is placed on the slope of the base 20 .
[0034] The semiconductor laser chip 100 has an emission surface 100a and a reflection surface 100b, which are opposite end surfaces of the resonator. The photodiode 40 is provided on the reflective surface 100b side, and the light beam emitted from the reflective surface 100b is detected by the light receiving portion 41 of the photodiode 40 . The structure of the semiconductor laser chip 100 and the method of manufacturing the semiconductor laser chip 100 will be described below.
[0035] (manufacturing of laser wafers)
[0036] Figure 2A and 2B as well as Figures 3A to ...
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