Sample platform of scanning electronic microscope and scanning electronic microscope

Abstract

The invention discloses a sample platform of a scanning electronic microscope and the scanning electronic microscope. The sample platform of the scanning electronic microscope comprises an outer barrel and a jack platform, wherein the jack platform is arranged in and connected with the outer barrel and is provided with a jack for a micro-cutter to insert; and the internal diameter of the jack corresponds to the external diameter of a handle part of the micro-cutter. The sample platform of the scanning electronic microscope used in the scanning electronic microscope comprises the outer barrel and the jack platform arranged in the outer barrel, and the outer barrel has a certain height and the jack platform is provided with the jack, so that the micro-cutter can be directly and vertically inserted into the jack to detect the scanning electronic microscope, operation is more convenient, and conditions of the micro-cutter, such as abrasion, cracks and the like can be observed without damaging the micro-cutter. Therefore, the sample platform of the scanning electronic microscope is very suitable for detecting the micro-cutter and has good detection effect.

Description

technical field [0001] The invention relates to the technical field of detection of micro-drills, in particular to a scanning electron microscope sample stage and a scanning electron microscope for micro-tools. Background technique [0002] Scanning electron microscope is an electron optical imaging instrument. It scans the surface of the sample with a very thin electron beam. The interaction between the high-energy electron beam and the substance generates various signals. These signals are received by an appropriate detector. After that, it is amplified by an amplifier (Amplifier), and then sent to a picture tube (Braun Tube) for imaging. It has the characteristics of simple sample preparation, wide adjustable range of magnification, high image resolution and large depth of field. [0003] The existing scanning electron microscope sample stage of the scanning electron microscope is usually in the shape of a platform or a plane, and the sample to be tested is placed on the...

AI Technical Summary

Problems solved by technology

Due to the limited space of the scanning electron microscope sample stage, when performing scanning electron microscope inspection on micro-tools, the part to be observed must be broken and put into the scanning electron microscope sample stage; and in order to observe the structure of the micro-tool tip, it is also necessary to use carbon tape to wrap the The tool is fixed vertically, not only the fixing operation is complicated, but also it is difficult to ensure sufficient verticality of the micro-knife

Images