Coating film supporting mechanism of high temperature deposition hard mask of film coating workpiece
A technology of supporting mechanism and workpiece, applied in sputtering coating, ion implantation coating, vacuum evaporation coating and other directions, can solve the problem of crushing infrared light window and other problems, achieve large supporting force, uniform contact force and low friction force Effect
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[0010] Taking the coated infrared light window as an example to illustrate the use process of the coating support mechanism:
[0011] Clean the coating tray, workpiece stopper, and locking screws, and fix the workpiece stopper on the coating tray with locking screws according to the size of the workpiece. Place the coating workpiece on the coating support device, so that the steel ball is in uniform contact with the inclined surface of the workpiece. Then, put the workpiece and the whole device into the ring tray of the coating machine, heat up, coat and cool down. After the coating machine is completely cooled, remove the workpiece and the coating support device together, unload the coating workpiece, and complete the coating.
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