Vacuum motive seal accurate transmission gear

Abstract

The invention discloses a vacuum motive seal accurate transmission gear. The vacuum motive seal accurate transmission gear also comprises a speed measurement assembly, wherein the speed measurement assembly comprises a photoelectric sensor, a sensor pad, and a sensor fixing seat; the photoelectric sensor is fixed on the sensor fixing seat; two detection arms are formed by the protrusion of the two ends on the same side of the photoelectric sensor; the sensor pad is coaxially fixed on a gear shaft for transmitting power into a vacuum chamber and is positioned between the two detection arms, has a compact structure, and is provided with a through groove; the photoelectric sensor sends an optical signal from one end of one detection arm to the other detection arm; and when the through groove rotates to the same plane as the two detection arms along with the sensor pad, the other detection arm can effectively absorb the optical signal. In the vacuum motive seal accurate transmission gear, the initial position of the starting of a motor can be recorded by matching the initial position with the sensor pad, the actual speed sent to the gear shaft from the motor can be detected synchronously, and accurate and stable transmission can be realized while vacuum cleanliness is guaranteed.

Description

technical field [0001] The invention relates to a transmission device, in particular to a vacuum dynamic sealing precision transmission device. Background technique [0002] The transmission device can change the mode, direction or speed of the movement provided by the power, and is used purposefully by people. Common transmission mechanisms mainly include gear transmission, belt transmission and hydraulic transmission, and the technical means of power transmission are widely used in various machinery and equipment. With the development of modern science and technology, the requirements for product quality and production technology have been continuously improved. Vacuum technology has become an indispensable technology and has been widely used in various technical fields. For example, in the manufacturing process of LCD-TFT display screens, organic light-emitting display device (OLED) panels, and thin-film solar panels using thin plates such as glass substrates, most of th...

AI Technical Summary

Problems solved by technology

For example, in the manufacturing process of LCD-TFT display screens, organic light-emitting display device (OLED) panels, and thin-film solar panels using thin plates such as glass substrates, most of them need to coat thin-film transistors on clean glass. The manufacturing process of such large glass substrates It usually includes the implementation of multiple consecutive steps, including chemical vapor deposition (CVD), physical vapor deposition (PVD), organic material evaporation, magnetron sputtering deposition or etching processes. The process requirements are relatively strict, and most It must be carried out in a vacuum state and in a completely clean space environment. Since the vacuum chamber that provides the vacuum environment is different from the internal and external environment of the atmospheric environment, the vacuum chamber requires a high degree of vacuum and cleanliness, and the chamber needs to be realized through a transmission device. The transmission of internal and external power, if the sealing is not good and the vacuum environment is insufficient during this process, the degree of glow discharge will be seriously affected. At the same time, the oxygen and water vapor in the air will also erode the target, resulting in the interruption of the magnetron sputtering process or / and deposition films are affected

In the vacuum transmission device, the power source is generally transmitted from the outside to the inside, so the first thing to solve is the seal between the transmission system and the vacuum chamber. It not only improves the sealing of the vacuum chamber, but also can transmit the power to the vacuum chamber smoothly. However, with the continuous improvement of people's requirements for product quality, higher requirements are put forward for the vacuum transmission. The existing vacuum transmission device The transmission speed cannot be precisely controlled, and the precise power output cannot be provided for the cavity. Therefore, a vacuum dynamic sealing precision transmission device capable of precise transmission is needed to solve the above problems

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