Film forming source, deposition apparatus and apparatus for manufacturing organic el element

Abstract

Provided is a film forming source with which a high-quality thin film can be formed. Since each switch valve (70) is in a closed state when a blocking member (72) adheres to a molten metal, gas blocking performance is high in the closed state, and furthermore, dusts are not generated. In the case of generating vapor of different deposition materials (39) by a plurality of vapor generating apparatuses (20), since the vapor generated by the selected vapor generating apparatus (20) is not mixed with the vapor generated by other vapor generating apparatus, the deposition material (39) other than for forming a film is not mixed, and contamination due to dust generation is not caused. Therefore, the high-quality thin film can be obtained.

Description

technical field [0001] The present invention relates to a vapor deposition device, and more particularly to a vapor deposition device for manufacturing organic EL elements. Background technique [0002] The organic EL element is one of the most concerned light-emitting elements in recent years, which has excellent characteristics of high brightness and fast response speed. [0003] In the organic EL element, a lower electrode film, an organic thin film, and an upper electrode film were sequentially laminated on a glass substrate in the order described below. [0004] The organic thin film includes: a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, and an electron injection layer. When the lower electrode film and the upper electrode film are energized and a voltage is applied to the organic film, the light-emitting layer emits light. [0005] In the case of a light-emitting layer formed by laminating colored layers of three...

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Problems solved by technology

As a result, compared with the initial state, the organic vapor deposition material 200 deteriorates, and the film quality of the organic thin film deteriorates.

[0013] In addition, when it is necessary to form a plurality of colored layers like the above-mentioned light-emitting layer, a plurality of vapor deposition containers 212 containing organic materials of different colors are prepared, and the substrate is moved on each vapor deposition container 212 to form a film. If the movement amount of the substrate increases, dust will be generated, which will cause deterioration of the film quality of the substrate

[0014] In addition, if the large-sized substrate 205 is held above the discharge port 224, the substrate 205 or the mask 214 will bend, and the film (lower electrode film or other organic thin film) previously formed on the surface of the substrate 205 may be damaged, or The problem that the film thickness distribution of the organic thin film newly formed on the substrate 205 deteriorates

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