Integrated magnetic elasticity sensor

Abstract

The invention relates to an integrated magnetic elasticity sensor, belonging to the technical field of micro electro mechanical systems. The integrated magnetic elasticity sensor comprises a glass substrate, a magnetic field excitation offset coil, a signal reception coil, a sensor support, a magnetic belt material and insulation material layers. The magnetic field excitation offset coil is located on the glass substrate; the signal reception coil is located above the magnetic field excitation offset coil; the sensor support is located above the signal reception coil; the insulation material layers are respectively located among the magnetic field excitation offset coil, the signal reception coil and the sensor support; and both ends of the magnetic belt material are fixed on the sensor support. The invention has the advantages of high processing precision and small size of the device, can eliminate background signals of the excitation signal in the reception coil by adopting an 8-shaped collection coil, realizes real-time monitoring of vibration signals and can realize the portable characteristic.

Description

technical field [0001] The invention relates to a device in the field of micro-electromechanical technology, in particular to an integrated magnetoelastic sensor. Background technique [0002] When the soft magnetic metallic glass strip is excited by the AC magnetic field pulse, due to the magnetoelastic coupling, it will generate forced mechanical vibration in the strip, and at the same time emit a changing magnetic flux in the space around the strip, and the vibration can be detected by the signal acquisition coil. When the AC pulse magnetic field excitation stops, the vibration amplitude of the strip will gradually attenuate, and its vibration frequency will be determined by the geometry, physical parameters and environmental conditions of the strip itself. In order to increase the magnetoelastic coupling performance of the sensor to enhance the vibration amplitude, it is usually necessary to superimpose a DC bias magnetic field to offset the magnetic anisotropy of the st...

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Problems solved by technology

[0007] After literature search, it was found that C.A.Grimes, etc. C.A.Grimes, C.S.Mungle, K.Zeng, M.K.Jain, W.R.Dreschel, M.Paulose and K.G.Ong published "AWireless , Passive, Magnetically-soft Harmonic Sensor for Monitoring Sodium Hypochlorite Concentrations in Water" (a kind of wireless passive soft magnetic harmonic sensor used for monitoring sodium hypochlorite content in water) article, the magnetoelastic sensor mentioned in this article adopts two coils, wherein One is the 8-shaped acquisition coil, and the other is used for the excitation coil. The 8-shaped coil can realize the elimination of the excitation signal at the back of the receiving coil, and can realize the real-time detection of strip vibration. However, the coil is made by hand, and the size Large education, high excitation power, and the strip is simply placed inside the coil, making it difficult to position precisely

[0008] M.K.Jain, etc. M.K.Jain, Q.Cai and C.A Grimes et al published "A wireless micro-sensor for simultaneous measurement of pH, temperature, and pressure" (a wireless miniaturized sensor that can simultaneously measure pH, temperature and air pressure), and C.Ruan et al. C.Ruan, K.Zeng, O.K.Varghese and C.A.Grimes in "Biosensors and Bioelectronics" ( Biosensors and Bioelectronics, 2004, Issue 20: 585-591) published the article "A staphylococcalenterotoxin B magnetoelastic immunosensor" (a type B Staphylococcus aureus enterotoxin magnetoelastic immunosensor), using a single coil to achieve signal Excitation and detection, but the coil is also hand-wound, which has the problems of large size and high power, and because there is only one coil, real-time monitoring of strip vibration cannot be realized, and it is necessary to perform excitation signals and receive Signal conversion, which has high requirements for the design of the detection signal circuit

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