Installation and adjustment device and method for alignment system reference board and detection optical fiber
A technology for detecting optical fibers and aligning systems, which is applied in the exposure device, installation, optics, etc. of the photoplate making process, and can solve problems such as inability to guarantee accuracy requirements, and achieve the effects of ensuring accuracy, large adjustment range, and high adjustment accuracy
Active Publication Date: 2011-02-16
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Problems solved by technology
Due to the accumulation of errors in the mechanical structure of the optical system, the accuracy requirements cannot be guaranteed only by virtue of machining accuracy and ordinary assembly methods. Therefore, it is necessary to design special adjustment devices and adjustment methods to achieve high assembly accuracy.
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[0038] The following will combine Figure 1 to Figure 7 The installation, adjustment device and adjustment method of the alignment system reference plate and detection optical fiber of the present invention are further described in detail.
[0039] see figure 1 and figure 2 , the installation device of the alignment system reference plate and detection optical fiber of the present invention includes a reference plate pressing plate 1, a reference plate support 2, a reference plate X / Y / Rz adjustment plate 3, an elastic connecting plate 4, a detecting optical fiber connecting plate 5, and a detecting optical fiber pressing plate 6 and optical fiber positioning frame 9;
[0040] The alignment system reference plate 10 is installed on one side of the reference plate X / Y / Rz adjustment plate 3, and the elastic connecting plate 4 is installed on the other side of the reference plate X / Y / Rz adjustment plate 3;
[0041] The reference board X / Y / Rz adjustment board 3 is installed on ...
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The invention relates to installation and adjustment device and method for an alignment system reference board and a detection optical fiber. The device comprises a reference board bracket, a reference board adjusting plate, a detection optical fiber connecting plate and an optical fiber locating bracket, wherein the alignment system reference board is arranged on one side of the reference board adjusting plate; the reference board adjusting plate is arranged on the side surface of the reference board bracket; the alignment system reference board is embedded in the reference board bracket; the optical fiber locating bracket is embedded in the detection optical fiber connecting plate, and the detection optical fiber connecting plate is arranged on the other side of the reference board adjusting plate; and one end of the detection optical fiber penetrates through the optical fiber locating bracket, the detection optical fiber connecting plate and the reference board adjusting plate in sequence, and connects to the rear end of the alignment system reference board.
Description
technical field [0001] The invention relates to a photolithography device, in particular to an installation and adjustment device and an installation and adjustment method of an alignment system reference plate and a detection optical fiber. Background technique [0002] Lithography equipment is mainly used in the manufacture of integrated circuits IC or other micro-devices. Through a photolithography device, multi-layer masks with different mask patterns are sequentially imaged on a photoresist-coated silicon wafer under precise alignment. In the semiconductor manufacturing process, in order to transfer the mask pattern to the silicon wafer correctly, the key step is to align the mask with the silicon wafer to meet the requirements of overlay accuracy. [0003] The silicon wafer alignment system is a key subsystem of the lithography machine, mainly used for silicon wafer alignment and workpiece table alignment. For the silicon wafer alignment system, there are two alignme...
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IPC IPC(8): G03F9/00G03F7/20G02B7/00G03B30/00
Inventor 袁永刚
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD