Apparatus for array test with cleaner units
A technology for array testing and cleaning cells, applied in measurement devices, cleaning methods and utensils, cleaning methods using gas flow, etc., can solve problems such as reducing test reliability and accuracy, foreign matter introduction, etc
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[0034] The following detailed description is intended to assist the reader in gaining a comprehensive understanding of the methods, apparatus and / or systems presented herein. Various changes, modifications, and equivalents to the systems, devices, and / or methods described herein will be apparent to those of ordinary skill in the art. Descriptions of well-known functions and constructions are omitted for conciseness.
[0035] The array testing device includes a probe assembly. The probe assembly applies a voltage to the electrodes formed on the substrate to test the electrode array formed on the substrate.
[0036] Specifically, the probe assembly includes a cleaning unit. A cleaning unit equipped for the probe assembly removes foreign matter from the substrate. Therefore, it is possible to effectively remove fine foreign matter that may be generated during transfer of the substrate or driving of the probe assembly.
[0037] Hereinafter, the technical structure of the array...
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