Base plate applied to flexible electronic device and manufacture method thereof
A technology of electronic devices and flexible substrates, which is applied in the field of stress-regulated substrates and its manufacturing, and can solve problems such as curling, uneven stress formed on plastic substrates, and warping and unevenness of flexible substrates.
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Embodiment 1
[0031] [Example 1] Production of polyimide B1317-BAPPm (Si02 / BB37) / alumina / parylene / glass substrate
[0032] First, at room temperature, 3 grams of silicon dioxide (SiO) dissolved in dimethylacetamide (hereinafter referred to as DMAc) with a solid content of 20% 2 ) and 7 grams of B1317-BAPPm (BB) dissolved in DMAc with a solid content of 20% were put into the sample bottle. Next, 0.3 g of amino-containing silicone—3-(trimethoxysilyl)propylamine) was added, and stirred at room temperature for 30 minutes. After that, apply it on the glass coated with 100nm-thick parylene and 100nm-thick alumina with a doctor blade, and put it into an oven and bake it at 80°C and 150°C for 1 hour respectively to obtain the glass of the present invention. substrate. Parylene is prepared by thermal evaporation. Alumina (Al 2 o 3 ) is prepared by RF magnetron sputtering, the radio frequency power is 200W, the working pressure is 2mtorr, and the gas flow rate is 13sccm Ar. And the area of al...
Embodiment 2
[0034] [Example 2] Production of polyimide B1317-BAPPm (SiO2 / BB37) / alumina / parylene / glass substrate
[0035] First, at room temperature, 3 g of silica (SiO 2 ) and 7 grams of B1317-BAPPm (BB) dissolved in DMAc with a solid content of 20% were put into the sample bottle. Next, 0.3 g of amino-containing silicone—3-triethoxysilylpropylamine (3-Triethoxysilylpropylamine) was added, and stirred at room temperature for 30 minutes. Afterwards, it is coated on the glass coated with 100nm parylene and 250nm alumina with a doctor blade, and baked in an oven at 80°C and 150°C for 1 hour respectively to obtain the substrate of the present invention. Parylene is prepared by thermal evaporation. Alumina (Al 2 o 3 ) is prepared by RF magnetron sputtering, the radio frequency power is 200W, the working pressure is 2mtorr, and the gas flow rate is 13sccm Ar. And the area of aluminum oxide is larger than that of parylene.
Embodiment 3
[0036] [Example 3] Production of polyimide B1317-BAPPm (SiO2 / BB37) / alumina / parylene / glass substrate
[0037] First, at room temperature, 3 g of silica (SiO 2 ) and 7 grams of B1317-BAPPm (BB) dissolved in DMAc with a solid content of 20% were put into the sample bottle. Then, 0.3 g of aminopropyl-methyl-diethoxysilane (Aminopropyl-methyl-diethoxysilane) containing amino group was added, and stirred at room temperature for 30 minutes. Afterwards, it is coated on the glass coated with 100nm parylene and 450nm alumina with a doctor blade, and baked in an oven at 80°C and 150°C for 1 hour respectively to obtain the substrate of the present invention. Parylene is prepared by thermal evaporation. Alumina (Al 2 o 3 ) is prepared by RF magnetron sputtering, the radio frequency power is 200W, the working pressure is 2mtorr, and the gas flow rate is 13sccm Ar. And the area of aluminum oxide is larger than that of parylene.
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