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Method for preparing molecular junction by polydimethylsiloxane stencil printing

A polydimethylsiloxane and stencil printing technology, used in the manufacture of microstructure devices, microstructure technology, microstructure devices, etc., can solve the problems of pattern structure deformation, influence of device yield, short circuit of upper and lower electrodes, etc. Avoid severe uncertainty, low-cost effects

Inactive Publication Date: 2011-06-15
NORTHEASTERN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since PDMS is an elastic material, it has a great influence on the yield of the prepared device, and it is easy to cause problems such as deformation of the graphic structure, adhesion, and short circuit of the upper and lower electrodes under the action of gravity and surface tension.

Method used

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  • Method for preparing molecular junction by polydimethylsiloxane stencil printing
  • Method for preparing molecular junction by polydimethylsiloxane stencil printing
  • Method for preparing molecular junction by polydimethylsiloxane stencil printing

Examples

Experimental program
Comparison scheme
Effect test

Embodiment １

[0032] The steps of the method for preparing molecular knots by polydimethylsiloxane template printing are as follows.

[0033] (1) Cleaning the Si substrate

[0034] On the upper and lower sides of a pure Si(100) substrate, 250 nm thick SiO was grown at 1150 °C by dry oxygen oxidation 2 layer, the oxidation time is 5 hours. Dip the cut-sized Si substrate into the piranha solution at 65°C, take it out after 15 minutes, and then immerse it in deionized water, acetone and alcohol successively and clean it with ultrasonic wave for 4 minutes respectively.

[0035] Note: the piranha solution is pure H 2 SO 4 and H at a mass concentration of 30% 2 o 2 The mixture mixed at a ratio of 4:1 by volume is a highly oxidatively active corrosive solution that may react violently with organic materials. Operators should pay attention to physical protection (wear goggles, lab coats, rubber gloves and work in a chemical fume hood).

[0036] (2) Photolithography

[0037] Spin-coat positi...

Embodiment ２

[0053] The steps of the method for preparing molecular knots by polydimethylsiloxane template printing are as follows.

[0054] (1) Cleaning the Si substrate

[0055] On the upper and lower sides of a pure Si(100) substrate, 300 nm thick SiO was grown at 1200 °C by dry oxygen oxidation 2 layer, the oxidation time is 6 hours. Dip the cut-sized Si substrate into piranha solution at 80°C, take it out after 10 minutes, and then immerse it in deionized water, acetone and alcohol successively and clean it with ultrasonic wave for 5 minutes respectively.

[0056] Note: the piranha solution is pure H 2 SO 4 and H at a mass concentration of 30% 2 o 2 The mixture mixed at a ratio of 4:1 by volume is a highly oxidatively active corrosive solution that may react violently with organic materials. Operators should pay attention to physical protection (wear goggles, lab coats, rubber gloves and work in a chemical fume hood).

[0057] (2) Photolithography

[0058] Spin-coat positive r...

Embodiment ３

[0073] The steps of the method for preparing molecular knots by polydimethylsiloxane template printing are as follows.

[0074] (1) Cleaning the Si substrate

[0075] On the upper and lower sides of a pure Si (100) substrate, a 200nm thick SiO is grown at 1100°C by dry oxygen oxidation. 2 layer, the oxidation time is 4 hours. Dip the cut Si substrate into the piranha solution at 50°C, take it out after 20 minutes, and then immerse it in deionized water, acetone and alcohol successively and clean it with ultrasonic wave for 3 minutes respectively.

[0076] Note: the piranha solution is pure H 2 SO 4 and H at a mass concentration of 30% 2 o 2 The mixture mixed at a ratio of 4:1 by volume is a highly oxidatively active corrosive solution that may react violently with organic materials. Operators should pay attention to physical protection (wear goggles, lab coats, rubber gloves and work in a chemical fume hood).

[0077] (2) Photolithography

[0078] Spin-coat positive re...

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Abstract

The invention provides a method for preparing a molecular junction by polydimethylsiloxane stencil printing, which comprises the following steps: cleaning a Si substrate, and then, carrying out photoetching; preparing a lower electrode; preparing a molecular self-assembly film on the surface of the Au lower electrode; preparing a polydimethylsiloxane stencil; preparing a polydimethylsiloxane seal; preparing an upper electrode; and then, carrying out upper electrode printing to obtain a crossed molecular junction. The invention provides a non-destructive preparation method of an upper electrode of a crossed molecular junction of an organic molecular layer, thereby avoiding the defects that when an Au film is directly deposited on the organic molecular layer, the upper electrode and the lower electrode are in short circuit because a small amount of metal particles penetrate into pores among molecules or ablative degradation is caused because of the evaporated and deposited heat. The method provided by the invention effectively avoids the serious uncertainty among metal / molecule contact interfaces.

Description

technical field [0001] The invention belongs to the technical field of electronic devices, relates to molecular electronic device technology, in particular to a method for preparing molecular junctions by polydimethylsiloxane template printing. Background technique [0002] In the field of molecular electronic devices, it is one of the trends in the development of ultra-miniaturization of electronic circuits in the future to realize the measurement and control of the photoelectric properties of several molecular aggregates or single-layer molecular thin films and the high integration and micronanoization of their devices. The basic idea of ​​building molecular electronic devices is to prepare molecular junctions with a metal-molecule-metal structure. However, it is still a huge challenge to realize the simple, cheap and efficient construction of micro-nano molecular junctions on a substrate with a certain limited area. At present, a preparation method with simple equipment, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/00B81C1/00H10K99/00
Inventor 李建昌王丹王珊珊周成巴德纯
Owner NORTHEASTERN UNIV
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