Light beam correcting projection equipment

Abstract

The invention relates to light beam correcting projection equipment for correcting a detection light beam projected by a light source along a projection direction, sequentially comprising a light guide slice, a lens group and a Fresnel lens group along the projection direction, wherein the light guide slice amplifies and homogenizes the detection light beam; the lens group has a first effective focal length F1 and includes a concavo-convex lens, a convexo-concave lens and a biconvex lens, and the focal lengths of the concavo-convex lens, the convexo-concave lens and the biconvex lens are respectively f1, f2 and f3; the Fresnel lens group has a second effective focal length F2 and is used for parallelizing the detection light beam, wherein f1 / F1 is more than and equal to 1.5 or less than and equal to 3.5, f1 / f2 is more than and equal to -1.0 or less than and equal to -0.2, f1 / f3 is more than and equal to 2.0 or less than and equal to 3.0, F1 / F2 is more than and equal to 0.1 or less than and equal to 0.4, the convexo-concave lens is 2-8 mm away from the concavo-convex lens, the biconvex lens is 3.1-9.2 mm away from the convexo-concave lens, and the Fresnel lens group is 180-500 mm away from the lens group.

Description

technical field [0001] The present invention relates to a beam correction projection device, in particular to a beam correction projection device used in an optical detection system for correcting a detection beam. Background technique [0002] According to, in the production line of liquid crystal display or large printed circuit board, etc., there is an optical detection step, the detection beam is projected on the substrate, and the image is captured for image processing to inspect the product. [0003] In the optical detection system of the known technology, the light path of the detection beam projected by the light beam projection device is relatively disordered. When detecting a three-dimensional object, it often forms a diffuse and black spot on the detection image, resulting in the problem of detection error. . [0004] Furthermore, in order to inspect defects easily, it is advisable to have a high illuminance of the inspection light beam, so that the known optical...

AI Technical Summary

Problems solved by technology

[0006] The object of the present invention is to solve the problems of disordered light path, poor uniformity and high illuminance requirements of the detection beam in the optical detection system in the known technology, and to provide a beam correction projection device to amplify, homogenize and parallelize the detection beam, greatly reducing the Illumination requirements and at the same time improve the quality of inspection

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