Piezoelectric microfluidic mixer
A microfluidic and mixer technology, applied in fluid state mixers, mixers, fluid velocity measurement, etc., can solve the problems of prolonged mixing time, poor mixing effect, small Reynolds number, etc., to achieve good mixing effect and promote mixing. , the effect of fast response
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[0015] Such as Figure 1-2 , the present invention has a pump body 5, the material of the pump body 5 is a silicon chip, the upper part of the pump body 5 is an upper substrate 1, the materials of the pump body 5 and the upper substrate 1 are glass, and the pump body 5 and the upper substrate 1 are bonded by an anode Combining technology together. On the upper substrate 1, two pump inlets 2, one pump outlet 4 and one pump chamber 7 are processed by laser, wherein the pump chamber 7 is located in the middle of the upper substrate 1, and the pump inlet 2 and pump outlet 4 are respectively located on the two sides of the pump chamber 7. side. The radius of the pump chamber 7 is 1500 , the height of the pump chamber 7 is 130 . The inlet cavity and the outlet cavity are processed on the pump body 5 by dry etching process, the inlet cavity communicates with the pump inlet 2 on the upper substrate 1 , and the outlet cavity communicates with the pump outlet 4 on the upper substr...
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