Electromagnetic suspension rotor micromotor with internally embedded stator

Abstract

The invention discloses an electromagnetic suspension rotor micromotor with an internally embedded stator in the technical field of micro electro mechanical system, which comprises a rotor and a stator arranged in the rotor in a rotating way. The rotor comprises disc plates of the rotor and connecting columns, wherein the two ends of a plurality of connecting columns are respectively, vertically and fixedly connected with two disc plates of the rotor; the stator comprises supporting columns, a basal body, substrates as well as an upper stator and a lower stator with same structures, wherein the supporting columns are arranged in the circular center of the rotor; moreover, the two ends of the supporting columns are respectively and fixedly connected with the lower stator and the substrates; moreover, the upper stator and the lower stator are respectively and fixedly connected with the upper surface and the lower surface of the basal body. Compared with the prior art, the electromagnetic suspension rotor micromotor with the internally embedded stator is provided with an electromagnetic suspension body, which increases the autostability of the motor.

Description

technical field [0001] The invention relates to a device in the technical field of micro-electro-mechanical systems, in particular to a stator-embedded electromagnetic levitation rotor micro-motor. Background technique [0002] The use of suspension technology can avoid the friction and wear caused by contact, so as to obtain high moving speed or rotation speed, and at the same time avoid the pollution of materials due to contact, so suspension technology is widely used in production or life, such as Maglev trains, electrostatic levitation bearings, electromagnetic levitation smelting technology, electrostatic gyroscopes, etc. Electromagnetic levitation is completely a passive levitation technology, that is, it does not need an external feedback control circuit to achieve autonomous levitation. At the same time, electromagnetic levitation has no strict requirements on the gap between electrodes. Compared with electrostatic levitation, the structure of electromagnetic levitat...

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Problems solved by technology

[0005] But the above-mentioned technology has the following deficiencies: 1. Two high-frequency currents with different frequencies need to pass through the series coil, which increases the complexity of the control circuit; 2. The stable levitation drive electromagnetic field and the rotation drive electromagnetic field overlap in space Together, so the mutual interference between them is increased; 3. The rotating electromagnetic field is distributed in the entire radius and length direction, but the rotating electromagnetic field at the larger radius plays the most role; 4. Since it can only be suspended on one side Drive, so the suspension stability of the whole device is not good, and the stable suspension anti-interference performance is poor; 5. With the increase of the current in the double-layer stable suspension coil, the suspension height of the micro-rotor increases, so the lateral stiffness of the suspension body is not adjustable. it is good

However, the electromagnetic levitation rotor micromotor with this structure has a closed rotor structure, which is not suitable for manufacturing by microfabrication methods.

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