Fully symmetric miniature silicon resonant pressure sensor

Abstract

The invention relates to a pressure sensor, in particular to a fully symmetric miniature silicon resonant pressure sensor. The fully symmetric miniature silicon resonant pressure sensor is based on lateral drive and can solve the problem of nonlinear driving force in an upper and lower planar plate driving structure and the problem of coupling between the driving force and a pressure sensitive diaphragm. The pressure sensor is provided with a resonant structure, four frustum-shaped silicon islands, a square silicon pressure sensitive diaphragm, a silicon frame and a lower glass layer; the inside of the silicon frame and the square silicon pressure sensitive diaphragm are connected into a whole; the four frustum-shaped silicon islands are symmetrically arranged on the diagonals of the square silicon pressure sensitive diaphragm; the four sides of the four frustum-shaped silicon islands are parallel to the four sides of the square silicon pressure sensitive diaphragm; the four frustum-shaped silicon islands suspend the resonant structure above the square silicon pressure sensitive diaphragm in parallel via four support beams connected with the four frustum-shaped silicon islands; and four lead electrodes on the four diagonals on the upper surface of the silicon frame are connected with the resonant structure via four flexible beams, thus realizing the electrical connection between the resonant structure and the outside.

Description

technical field [0001] The invention relates to a pressure sensor, in particular to a fully symmetrical silicon micro-resonant pressure sensor based on lateral drive. Background technique [0002] The silicon microresonant pressure sensor based on MEMS technology is currently the most accurate silicon micro pressure sensor. It indirectly measures the pressure by detecting the natural frequency of the object, and outputs quasi-digital signals. It can be directly interfaced with the computer, and it is easy to form an instrument that directly displays numbers. Its accuracy is mainly affected by the mechanical characteristics of the structure, so it has strong anti-interference ability and stable performance. In addition, the silicon microresonant pressure sensor also has many advantages such as fast response, wide frequency band, compact structure, low power consumption, small size, light weight, and mass production, and has been widely used in aviation, aerospace, industrial...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the difficulty in the arrangement of excitation electrodes and detection electrodes in the prior art, and to provide a solution to the nonlinear problem of the driving force in the upper and lower plate driving structures, as well as the coupling problem between the driving force and the pressure sensitive diaphragm, based on A fully symmetrical silicon microresonant pressure sensor driven laterally

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