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Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine

A vacuum suction cup and adjustable technology, which is applied in the field of deep ultraviolet lithography machine projection objective lens manufacturing and assembly, can solve problems such as component damage, and achieve the effect of simple structure and large adjustment range

Inactive Publication Date: 2011-08-24
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem of damage to the surface of optical elements and mechanical parts in the pick-and-place and handling process of the existing lithography projection objective lens in the process of manufacturing and assembly, the invention provides an adjustable vacuum for lithography machine lens assembly and adjustment Suction device

Method used

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  • Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine
  • Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine
  • Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine

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specific Embodiment approach 1

[0015] Specific implementation mode 1. Combination Figure 1 to Figure 5 Describe this embodiment, an adjustable vacuum chuck used in the manufacture and adjustment of lithography machine lenses, the device includes an adapter 1, an upper cover 2, a housing 3, a worm wheel 4, a worm 5, an adjustment handle 6, and a dial pin 7 , positioning ring 8, pin shaft 9, connecting rod 10, suction nozzle joint 11, rubber suction nozzle 12 and vacuum suction pipe 13, the adapter 1 is tightly connected with the upper cover 2, and the outer shell 3 is fixed on the upper cover 2; The bottom of the upper cover 2 is a hollow shaft 2-2 with an external thread 2-2-1; the internal thread of the positioning ring 8 cooperates with the external thread of the hollow shaft 2-2; the positioning ring 8 connects the worm wheel 4 Axially positioned on the hollow shaft 2-2, the housing 3 is provided with a positioning mechanism supporting the worm 5 and the adjustment handle 6, the worm 5 is fixed on the p...

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Abstract

The invention provides an adjustable vacuum sucker device for assembling and adjusting a lens of a photoetching machine and relates to the technical field of the manufacturing, assembly and adjustment of projection objective lens of deep ultraviolet photoetching machines. By the adjustable vacuum sucker device, the problem that lenses, lens barrels and lens frames of different dimensions cannot be reliably absorbed and transported in the process of processing and assembling photoetching projection objective lenses is solved. The adjustable vacuum sucker device comprises an adaptive joint, an upper cover, a shell, a worm wheel, a worm screw, an adjusting handle, shift pins, a connecting rod and rubber suction nozzles. The three shift pins which are circumferentially and uniformly distributed are driven to rotate through the meshing driving of the worm wheel and the worm screw; and the shift pins shift the connecting rod to make the centrosymmetrical three rubber suction nozzles synchronously moved from the center to the periphery. The sucker device has a simple structure, steplessly adjustable suction ranges, large adjustment ranges and capability of self locking, and the rubber suction nozzles do not damage the surfaces of sucked workpieces. The sucker device can be used for sucking optics lenses and the suction of parts such as the lens frames and the like with annular end faces, has a simple structure, can be used for nondestructive clamping, is continuously adjustable, and can simultaneously suck the lenses and the lens frames.

Description

technical field [0001] The invention relates to the technical field of manufacturing and assembling the projection objective lens of a deep ultraviolet lithography machine, in particular to an adjustable vacuum chuck device that can be used for transporting lenses, lens barrels and frames of different sizes during the process of processing and assembling a projection objective lens for lithography. Background technique [0002] The manufacturing and assembly of lithography projection objective lens is a very precise and complex process, whether it is the fine grinding, polishing and testing of the lens, or the precision machining and testing of the frame, as well as the clamping of the lens and the frame during the assembly process, all need Frequently transport lenses and frames back and forth between different processing equipment and testing equipment. In this process, it must be strictly guaranteed that no damage will be caused to the optical surface of the lens and the ...

Claims

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Application Information

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IPC IPC(8): G02B27/62G03F7/20
Inventor 倪明阳巩岩张巍赵阳赵磊
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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