Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine
A vacuum suction cup and adjustable technology, which is applied in the field of deep ultraviolet lithography machine projection objective lens manufacturing and assembly, can solve problems such as component damage, and achieve the effect of simple structure and large adjustment range
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[0015] Specific implementation mode one, combination Figure 1 to Figure 5 In this embodiment, an adjustable vacuum chuck used for the manufacture and adjustment of a lithography machine lens. The device includes an adapter 1, an upper cover 2, a housing 3, a worm wheel 4, a worm 5, an adjustment handle 6, and a lever 7 , Positioning ring 8, pin 9, connecting rod 10, nozzle joint 11, rubber nozzle 12 and vacuum suction tube 13, said adapter 1 is firmly connected to the upper cover 2, and the housing 3 is fixed on the upper cover 2; The bottom of the upper cover 2 is a hollow shaft 2-2 with an external thread 2-2-1; the internal thread of the positioning ring 8 matches the external thread of the hollow shaft 2-2; the positioning ring 8 connects the worm wheel 4 Axially positioned on the hollow shaft 2-2, the housing 3 is provided with a positioning mechanism supporting a worm 5 and an adjustment handle 6. The worm 5 is fixed on the positioning mechanism of the housing 3 and mesh...
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