Measurement method for verticality of optical axis of microscope system

Abstract

The invention provides a measurement method for the verticality of an optical axis of a microscope system. In the invention, two identical calibrating boards are arranged on an intersecting line of an inclined plane of the optical axis and an optical platform at a distance (L), a light path entering the microscope system is extended to form two arms, a motor drives a microscope lens to move in a direction vertical to the optical platform at a certain step length (S), and images of the two calibrating boards are obtained respectively; and the definitions of the images of the calibrating boards are subjected to quantized judgment by using a computer vision based definition evaluation function (TenenGrad function), and are subjected to normalized comparison, if the definitions of the images of the calibrating boards are within 1% of a judging criterion, the optical axis of the microscope system is judged to be vertical, and the verticality of the optical axis at the moment is calculated, namely h equals to S / L. In the invention, the verticality of the optical axis of the microscope system and the optical platform is measured by using applied optics and machine vision image processing knowledge, so that the optical axis is ensured to be vertical to the platform within an error range. The method has the advantages of high measurement accuracy, simplicity in system and high feasibility.

Description

technical field [0001] The invention belongs to the technical field of measuring instruments and equipment, and relates to the field of applied optics and image measurement technology based on machine vision. Background technique [0002] Microscopic systems are widely used in laboratory research and industrial production. The perpendicularity between the optical axis of the microscope and the measured object has a direct impact on the subsequent image processing and measurement work, as well as the three-dimensional reconstruction of the image. [0003] When the current microscope system performs measurement work, the optical axis cannot be completely guaranteed to be completely perpendicular to the measured object under actual conditions, and the camera needs to be calibrated in advance, which is a cumbersome process. Most of the time, the measured object is placed on the optical table or kept parallel to the optical table, so if the optical axis of the microscopic system ...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a new method for measuring the perpendicularity of the optical axis of the microscopic system in order to make up for the current gap in the measurement of the perpendicularity between the optical axis of the microscopic system and the optical platform, solve the problems that the current mechanical method is too rough, simple, and have large errors

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