Standard substance for calibrating magnification of industrial computed tomography (CT) system
An industrial computer and tomography technology, applied in the direction of material analysis using radiation, which can solve problems such as unseen magnification, no electrical conductivity, no fixed position length measurement characteristics, etc.
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[0013] Embodiment 1: refer to figure 1 , figure 2 , image 3 , Figure 4 , Figure 5 , Figure 6 . The present invention needs to carry out value determination to the present invention before carrying out measurement standard value transfer, the value determination example of the present invention is as follows: put the certified standard substance of the present invention and the scanning electron microscope into the scanning electron microscope at the same time, the certified standard substance It was developed by Agar Science Company of the United Kingdom, and its traceability was determined by the National Physical Laboratory (NPL) of the United Kingdom. In this embodiment, the diameter of the through hole is selected as 0.2 mm or 0.5 mm. In the state of the low magnification and large field of view of the scanning electron microscope, the rotation function of the sample stage is used to place the connecting line direction between the center of the through hole and ...
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