Wet Coating System
A wet coating, chamber technology, applied in liquid chemical plating, metal material coating process, coating and other directions, can solve the problems of easy oxidation, decreased yield, poor film quality, etc., to avoid oxidation, The effect of improving yield
Inactive Publication Date: 2014-10-15
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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Problems solved by technology
Generally, during wet coating, the substrate needs to be circulated in different equipment for cleaning, air drying, coating, annealing and other processes. During the circulation process, the substrate or the film layer coated on the substrate is exposed to the air and is easily oxidized , resulting in poor quality of the plated film and a decrease in yield
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[0029] The embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0030] see figure 1 , the wet coating system 100 of the preferred embodiment of the present invention comprises a low temperature chamber 10, a heating chamber 30, an isolation chamber 20, a transport device 40, a cleaning tank 50, a coating tank 60, a hot air spray tank 70 and a heating tank 80. The isolation chamber 20 communicates with the low temperature chamber 10 and the heating chamber 30 to form a sealed vacuum coating chamber 101 . The transport device 40 includes a sliding rail 42 and a lifting arm 44 . The slide rail 42 straddles the low temperature chamber 10 , the isolation chamber 20 and the heating chamber 30 . The lifting arm 44 is slidably disposed on the slide rail 42 for clamping a substrate 200 and driving the substrate 200 to expand and contract along a direction perpendicular to the slide rail 42 . The cleaning tan...
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The invention relates to a wet-type coating system, which comprises a low-temperature cavity, a heating cavity, an insulating cavity, a transmitting device, a cleaning tank, a coating tank, a hot air blowing tank and a heating tank. The insulating cavity is communicated with the low-temperature cavity and the heating cavity to form a closed vacuum coating cavity. The transmitting device comprises a rail overcrossing the low-temperature cavity, the heating cavity and the insulating cavity and a lifting arm which is arranged on the sliding rail in a sliding manner and is used for holding a substrate. The cleaning tank, the coating tank, the hot air blowing tank and the heating tank are arranged under the sliding rail in turn along a sliding direction from the low-temperature cavity to the heating cavity. The cleaning tank and the coating tank are positioned in the low-temperature cavity; the hot air blowing tank is positioned in the insulating tank; and the heating tank is positioned in the heating cavity. Thus, the substrate can be cleaned, coated, air dried and annealed in a single and closed environment in turn, so that the substrates are protected from being oxidized in stream assembly in different devices and the yield is increased.
Description
technical field [0001] The invention relates to coating technology, in particular to a wet coating system. Background technique [0002] Thin film preparation technology can generally be divided into two types: dry coating and wet coating. Among them, wet coating has simple and cheap coating equipment, fast deposition rate, easy control of coating thickness, low coating temperature, and is not limited by the shape of the coating substrate. And materials (even coating on soft substrates), etc., have been widely used in the preparation of thin films on ceramics, polymers and metal substrates in recent years. Generally, during wet coating, the substrate needs to be circulated in different equipment for cleaning, air drying, coating, annealing and other processes. During the circulation process, the substrate or the film layer coated on the substrate is exposed to the air and is easily oxidized , leading to poor quality of the plated film layer and a decrease in yield. Conten...
Claims
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IPC IPC(8): C23C18/00
Inventor 裴绍凯
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD