Micro-nano-scale in-situ indentation testing device based on double-displacement detection
A displacement detection and testing device technology, applied in the direction of testing material hardness, etc., can solve the problems of difficulty in online detection and large overall size of the device.
Inactive Publication Date: 2013-03-27
JILIN UNIV
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[0007] The purpose of the present invention is to design a measurement and detection device for indentation experiments. The present invention carries out indentation tests under the monitoring of a scanning electron microscope (SEM) to obtain material mechanical performance parameters, and conducts in-situ monitoring of material deformation damage under load. Its deformation damage mechanism and its correlation with load action and material properties solve the problem that the existing measurement of mechanical properties and detection of microscopic appearance are independent and separated processes and the overall size of the device is large, Problems that are difficult to implement online detection
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[0027] The detailed content of the present invention and its specific implementation will be further described below in conjunction with the accompanying drawings.
[0028] The present invention mainly consists of a macro adjustment mechanism for coarse displacement adjustment of indentation loading, a high-precision stepping motor 1 for driving the macro adjustment mechanism, and a precision micro-displacement adjustment device based on a piezoelectric stack 13 and a flexible hinge 12 system 1. A precision displacement detection device based on precision displacement sensors 11 and 16 for detecting the travel displacement of the flexible hinge, an indenter assembly fixed on the base 3 and a test piece assembly. The output shaft of the stepping motor 1 is connected with the shaft coupling 4. The macro adjustment mechanism is composed of an adjustment shaft 5, a sliding support plate 6, a baffle plate 7 and a fixed support plate 8 fixed on the base 3. The precision micro-displac...
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The invention relates to a micro-nano-scale in-situ indentation testing device based on double-displacement detection. The device can perform in-situ nano-indentation testing for testing mechanical properties of material under in-situ monitoring of a scanning electronic microscope, a transmission electronic microscope, a Raman spectrometer, a high-resolution optical microscope, an X-ray diffractometer and other instruments and devices. The technical scheme of the device is as follows: a test piece macro-motion adjustment mechanism and a diamond tool head component are mounted on a base of thedevice; a precision micro-displacement loading unit is mounted on a sliding table of the test piece macro-motion adjustment mechanism through a support seat; and two displacement sensors of a precision displacement detection unit are embedded into the precision micro-displacement loading unit, pressing-in load and pressing-in depth value during the pressing-in process are obtained through displacement changes, and mechanical parameters of the material are finally calculated by combining with pressing-in theory. The device is compact and miniature in structure and the shortcomings of large size and incapability of dynamically monitoring the deformation damage process of the existing testing device due to the use of a loading force sensor.
Description
technical field [0001] The invention relates to a high-performance precision testing device for mechanical properties of materials integrating ultra-precision driving loading, load signal and deformation signal detection, micro-nano scale indentation / scratch testing, and in-situ monitoring of material denaturation and damage. Involving the indentation test in the micromechanical performance test of material specimens, especially the in-situ nano-indentation experimental test device, which belongs to the precision scientific instrument integrating optomechanical and electrical integration. Background technique [0002] Micro-nano-scale material mechanical performance testing technologies mainly include nano-indentation, nano-scratch, micro-stretching, micro-bending, and special testing technologies for MEMS and related supporting technologies. According to whether the deformation and damage of the material can be monitored online and in real time by instruments such as electr...
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Inventor 赵宏伟黄虎史成利胡磊磊杨洁万顺光马志超王小月米杰张霖
Owner JILIN UNIV