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Micro-area optical damage test method and device

A technology of optical damage and testing methods, which is applied in measurement devices, material analysis by optical means, scientific instruments, etc., can solve problems such as inability to measure, and achieve the effect of overcoming large errors

Inactive Publication Date: 2011-12-07
CHANGCHUN UNIV OF SCI & TECH
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Problems solved by technology

[0003] The micro-area of ​​damage caused by laser to optical glass cannot be measured by traditional methods

Method used

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  • Micro-area optical damage test method and device
  • Micro-area optical damage test method and device
  • Micro-area optical damage test method and device

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Experimental program
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Effect test

Embodiment Construction

[0024] In the first step, take the K9 glass sample (4) and place it in the center of the field of view of the microscope (2), observe the size of the damaged area of ​​the optical glass and its proportion in the field of view, and use the image processing function of the reading microscope (2) to measure the damage The size of the area, storing images such as figure 2 Shown.

[0025] In the second step, the optical fiber spectrometer (1) is used to measure the transmission spectrum of the sample before and after damage.

[0026] The third step is to calculate the spectral transmittance according to the spectral transmittance algorithm.

[0027] After measurement, the area of ​​the damaged area is recorded as 548.2433, and the field of view area is 2202.1461

[0028] A D A = 0.248959

[0029] Use Origin software to calculate the transmission spectrum curve before and after damage, using the formula

[0030] ΔT(λ i )=T 0 (λ i )-T D (λ i )

[0031] E loss ( λ...

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Abstract

The invention belongs to the field of optical testing, and relates to a method and a device for measuring the optical transmittance of a micro-area, especially in the aspect of detecting the micro-area damage caused by laser light to glass. Optical glass is an essential component in the laser application process. Its transmittance indicates the strength of the laser transmission ability and is an important basis for judging the degree of laser damage. As lasers are increasingly used in medical, military, scientific research, industrial processing and other fields, the measurement of optical glass transmittance becomes extremely important. Since the diameter of the damaged area of ​​optical glass is generally small, it is difficult to accurately measure its transmittance by traditional spectrophotometry. This paper proposes a method and device for measuring the damaged area by combining a microscope and a fiber optic spectrometer, as shown in Figure 1. While quantitatively analyzing the size of the region, the transmission spectrum before and after the damage of the region is measured, and the spectral transmittance is calculated. This technology overcomes the problem of large errors in the measurement of micro-area damage by traditional methods, and provides a new idea and method for testing the transmittance or reflectance of micro-units.

Description

Technical field [0001] The invention belongs to the field of optical testing, and relates to a method and a device for measuring the optical transmittance of a micro-area, particularly in the aspect of detecting micro-area damage caused by a laser to glass. Application areas include optical component production and inspection, laser-substance interaction research, laser processing equipment research and development and other fields. Background technique [0002] Laser damages the optical glass, which changes the topography of the material surface or produces internal defects. Since the undamaged area is much larger than the damaged area, the traditional method of measuring its transmittance can only observe the overall effect, and it is almost invisible. It is difficult to achieve accurate measurement because of the changes in spectral transmittance before and after damage. [0003] Traditional methods cannot measure the micro-zone of damage caused by laser to optical glass. In t...

Claims

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Application Information

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IPC IPC(8): G01N21/958G01N21/59
Inventor 谭勇张宇蔡红星李昌立徐立君毕娟张喜和
Owner CHANGCHUN UNIV OF SCI & TECH
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