Micro-area optical damage test method and device

A technology of optical damage and testing methods, which is applied in measurement devices, material analysis by optical means, scientific instruments, etc., can solve problems such as inability to measure, and achieve the effect of overcoming large errors
CN102269716AInactive Publication Date: 2011-12-07CHANGCHUN UNIV OF SCI & TECH

Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
CHANGCHUN UNIV OF SCI & TECH
Publication Date
2011-12-07
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention belongs to the field of optical testing, and relates to a method and a device for measuring the optical transmittance of a micro-area, especially in the aspect of detecting the micro-area damage caused by laser light to glass. Optical glass is an essential component in the laser application process. Its transmittance indicates the strength of the laser transmission ability and is an important basis for judging the degree of laser damage. As lasers are increasingly used in medical, military, scientific research, industrial processing and other fields, the measurement of optical glass transmittance becomes extremely important. Since the diameter of the damaged area of ​​optical glass is generally small, it is difficult to accurately measure its transmittance by traditional spectrophotometry. This paper proposes a method and device for measuring the damaged area by combining a microscope and a fiber optic spectrometer, as shown in Figure 1. While quantitatively analyzing the size of the region, the transmission spectrum before and after the damage of the region is measured, and the spectral transmittance is calculated. This technology overcomes the problem of large errors in the measurement of micro-area damage by traditional methods, and provides a new idea and method for testing the transmittance or reflectance of micro-units.
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Description

Technical field

[0001] The invention belongs to the field of optical testing, and relates to a method and a device for measuring the optical transmittance of a micro-area, particularly in the aspect of detecting micro-area damage caused by a laser to glass. Application areas include optical component production and inspection, laser-substance interaction research, laser processing equipment research and development and other fields. Background technique

[0002] Laser damages the optical glass, which changes the topography of the material surface or produces internal defects. Since the undamaged area is much larger than the damaged area, the traditional method of measuring its transmittance can only observe the overall effect, and it is almost invisible. It is difficult to achieve accurate measurement because of the changes in spectral transmittance before and after damage.

[0003] Traditional methods cannot measure the micro-zone of damage caused by laser to optical glass. In t...

Claims

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