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High vacuum glass oil diffusion pump

An oil diffusion pump and high vacuum technology, applied in diffusion pumps, pumps, non-displacement pumps, etc., can solve the problems that cannot be well satisfied and the requirements of vacuum pumping degree are getting higher and higher, and can improve the degree of vacuum pumping. Effect

Inactive Publication Date: 2011-12-14
SHANGHAI YIXI ELECTRONICS TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0004] However, with the advancement of society and the vigorous promotion of energy saving and emission reduction, more and more high-efficiency energy-saving lamps are widely developed and used, so the requirements for the degree of vacuum in their production processes are also getting higher and higher. The vacuum glass oil diffusion pump is obviously unable to better meet this demand.

Method used

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Embodiment Construction

[0016] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0017] see image 3 Shown, high vacuum glass oil diffusion pump 30 of the present invention comprises by main pump body 31 and secondary pump body 36, main pump body 31 and four-stage vacuum glass oil diffusion pump 20 of prior art (see figure 2 The structure of the pump body 21 of ) is basically the same, and the upper and lower sides of the main pump body 31 are also connected with the suction pipe 32 and the suction pipe 33 respectively. The first to fourth four-stage nozzles 35 , wherein the fourth-stage nozzle 35 faces the exhaust pipe 33 . The auxiliary pump body 32 is then connected to the other end of the air extraction pipe 33 , and the auxiliary pump body 32 is also provided with several stages of nozzles 35 communicating with the air extraction pipe 33 , and the other end of the auxiliary pump body 32 is provided ...

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Abstract

The invention discloses a high-vacuum glass oil diffusion pump. The pump comprises a main pump body. The upper and lower sides of the main pump body are respectively connected with a suction pipe and a suction pipe. The main pump body is provided with an oil delivery pipe. There are four-stage nozzles, and the pump also includes a secondary pump body, which is connected to the other end of the suction pipe, and the secondary pump body is also provided with several stages of nozzles connected with the suction pipe, and the other end of the secondary pump body is provided with a suction port. Through the joint action of the auxiliary pump body and the nozzle of the main pump body, the oil vapor can be more evenly diffused into the entire pump body and pipeline, thereby effectively improving the vacuum degree of the system and fully meeting the production process of various high-vacuum products. need.

Description

technical field [0001] The invention relates to a vacuum glass oil diffusion pump, in particular to a high vacuum glass oil diffusion pump. Background technique [0002] At present, there are two common vacuum glass oil diffusion pumps, please refer to figure 1 As shown, one is a three-stage vacuum glass oil diffusion pump 10, which includes a glass pump body 11. The upper and lower sides of the pump body 11 are respectively connected with a suction pipe 12 and a suction pipe 13. The pump body 11 is provided with an oil delivery pipe 14, and the oil delivery pipe 14 is respectively provided with three stages of nozzles 15 from top to bottom. Its working principle is that under the low vacuum condition caused by the fore-stage vacuum pump, the silicone oil in the heating pump is boiled and evaporated to generate oil vapor, which is sprayed out at a slightly high speed through the gaps of the nozzles 15 of each level of the pump 10, so that the pump The gas molecules inside ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04F9/02
Inventor 邹仲秋
Owner SHANGHAI YIXI ELECTRONICS TECH
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