Analytical method of adsorption column for polysilicon tail gas dry separation system

A separation system and analysis method technology, which is applied in the field of adsorption column analysis of polysilicon tail gas dry separation system, can solve the problems of hydrogen shortage, hydrogen waste, hydrogen flammability and explosion, and achieve the effect of saving hydrogen and reducing production costs

Inactive Publication Date: 2011-12-21
SICHUAN RENESOLA SILICON MATERIAL
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  • Abstract
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  • Application Information

AI Technical Summary

Problems solved by technology

After backflushing, the hydrogen entrains a large amount of chlorosilanes. After the chlorosilanes are cooled and separated by circulating water and refrigerant in turn, the hydrogen is sent to the raffinate treatment workshop to be rinsed with circulating water, and then directly vented. On the one hand, this treatment makes the hydrogen not effectively utilized. , resulting in a large amount of waste of hydrogen, which increases production costs; on the other hand, there is a serious shortage of hydrogen in polysilicon production. At the same time, hydrogen is flammable and explosive, and leaching and venting pose a safety hazard

Method used

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  • Analytical method of adsorption column for polysilicon tail gas dry separation system
  • Analytical method of adsorption column for polysilicon tail gas dry separation system

Examples

Experimental program
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Effect test

Embodiment 1

[0026] Such as figure 1 As shown, a polysilicon tail gas dry separation system adsorption column analysis method includes the following steps:

[0027] a) First use nitrogen gas to backflush the adsorption column, close vent valve 7 and valve 4, open valve 1, valve 2, valve 3, valve 5, regulating valve PV3503, valve 6, regulating valve PV3505, and the inlet pressure is 1.12 The nitrogen gas of MPa is used to backflush the adsorption column for 6000 seconds, and the flow rate of nitrogen gas is 100Nm 3 / h.

[0028] b) Replace the adsorption column with hydrogen, close valve 1, open valve 7, open valve 4, valve 5, regulating valve PV3503, valve 6, regulating valve PV3505, and introduce hydrogen with a pressure of 1.12MPa to replace the adsorption column 1200 seconds.

[0029] c) After backflushing, the nitrogen or hydrogen with a large amount of chlorosilane is cooled by circulating water and refrigerant. After the chlorosilane is separated, the nitrogen or hydrogen is sent t...

Embodiment 2

[0032] Such as figure 1 As shown, a polysilicon tail gas dry separation system adsorption column analysis method includes the following steps:

[0033] a) Use nitrogen gas to backflush the adsorption column first, close vent valve 7 and valve 4, open valve 1, valve 2, valve 3, valve 5, regulating valve PV3503, valve 6, regulating valve PV3505, and the inlet pressure is 1.15 The nitrogen gas of MPa is used to backflush the adsorption column for 6000 seconds, and the flow rate of nitrogen gas is 100Nm 3 / h.

[0034] b) Replace the adsorption column with hydrogen, close valve 1, open valve 7, open valve 4, valve 5, regulating valve PV3503, valve 6, regulating valve PV3505, and introduce hydrogen with a pressure of 1.15MPa to replace the adsorption column 1200 seconds.

[0035] c) After backflushing, the nitrogen or hydrogen with a large amount of chlorosilane is cooled by circulating water and refrigerant. After the chlorosilane is separated, the nitrogen or hydrogen is sent t...

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Abstract

The invention discloses a method for analyzing an adsorbing column of a polycrystalline silicon tail gas dry method separation system. The method comprises the following steps of: a) performing back flushing and analysis on the adsorbing column by using nitrogen; b) replacing the adsorbing column by using hydrogen; and c) cooling the nitrogen or hydrogen which carries a large amount of chlorosilane by circulating water and a refrigerating fluid after back flushing and cooling, and after the chlorosilane in the nitrogen or the hydrogen is separated, conveying nitrogen or hydrogen to a raffinate treatment workshop and leaching and emptying. The method overcomes the conditions that hydrogen used for back flushing is not effectively utilized, and hydrogen is seriously insufficient in the production of polycrystalline silicon and avoids the potential safety hazard brought by leaching and emptying; and after the adsorbing column is subjected to back flushing and analysis by using the nitrogen with relatively low cost instead of hydrogen, the adsorbing column is replaced by the hydrogen, so that the hydrogen can be effectively saved, and the production cost and potential safety hazard brought by leaching and emptying are reduced.

Description

technical field [0001] The invention relates to an adsorption column analysis method for a polysilicon tail gas dry separation system. Background technique [0002] In the traditional crystalline silicon production process, the tail gas produced mainly includes hydrogen, hydrogen chloride, dichlorodihydrosilane, trichlorosilane, and silicon tetrachloride. These tail gases mainly rely on the tail gas separation device to recover hydrogen, hydrogen chloride and chlorine respectively. Silane liquid, in which activated carbon adsorption technology is used for hydrogen recovery, and the purity of recovered hydrogen is about 97%. However, due to the entrainment of a small amount of hydrogen chloride and chlorosilane liquid in hydrogen, the adsorption column will reach saturation after a long time of adsorption, and hydrogen must be used to react the adsorption column. Blow analysis to regenerate activated carbon. After backflushing, the hydrogen entrains a large amount of chloros...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/04
Inventor 沈伟孙明炳
Owner SICHUAN RENESOLA SILICON MATERIAL
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