Direct drive rotary unit

Abstract

The invention relates to a direct drive rotating device belonging to the technical field of semiconductor packaging equipment. The direct drive rotating device comprises a shell, a stator, a lower cover, a rotor, a bearing, a grating scale and a code reader, wherein the rotor consists of a magnet yoke and a permanent magnet. The direct drive rotating device is characterized in that a plurality ofgroups of first air holes are arranged on the wall of the shell and around the circumferential direction of the wall, the number of each group of first air holes is a pair, and cooling air joints arearranged on the first air holes in a matching way; a plurality of groups of second air holes are arranged on the stator and around the edge part of the circumferential direction of the stator; air passage grooves with a same group number are arranged on the edge part of one side of the lower cover, wherein the one side faces to the stator; and the first air holes, the second air holes and the airpassage grooves are mutually communicated. According to the direct drive rotating device disclosed by the invention, a coil winding of the stator is prevented from being heated and even burned by reducing coil winding, the requirement for high-speed rotation of a direct drive motor is met, the trouble of pollution caused by leakage is prevented, structure is simplified, volume is reduced, the influence of an external environment is prevented from being suffered, and the rigidity of the rotor is beneficial to enhance.

Description

technical field [0001] The invention belongs to the technical field of semiconductor packaging equipment, and in particular relates to a direct drive rotating device . Background technique [0002] The above-mentioned direct-drive rotary device is an abbreviation for a direct-drive rotary device, which does not need to use transitional components such as transmission belts and transmission wheels when driving the load to rotate. [0003] As is well known in the industry, the semiconductor packaging process has extremely strict requirements on packaging equipment. For example, the positioning accuracy and frequency response characteristics of the horizontal rotary motion of the swing arm of the semiconductor packaging equipment are directly related to the packaging equipment yield and quality. work efficiency. With the continuous improvement of semiconductor packaging efficiency, it is increasingly required that the driving source for driving the swing arm must meet the...

AI Technical Summary

Problems solved by technology

[0007] In addition, there are disadvantages that the grating ruler (the patent is called non-contact precision circular grating) and the encoder (the patent is called non-contact reading head) are easily damaged, because it is the ability to resist external interference or influence. The fragile grating ruler and encoder are exposed, for details, please refer to the last two lines on page 3 of the patent specification

In addition, the patented solution is difficult to ensure the rigidity of the rotor (the patent is called the direct drive motor rotor), although it uses a high-precision and high-rigidity large-diameter one-way bearing (line 4, page 4 of the manual), and this bearing is a special Bearings are difficult to obtain from commercial channels. In addition, it is not only troublesome to connect the rotor to the inner ring of the bearing with long bolts, but also loses the compactness and simplicity of the structure.

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