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Surface measuring device and its measuring method and calibration method

A technology for surface measurement and correction methods, applied in measurement devices, optical devices, instruments, etc.

Inactive Publication Date: 2011-12-28
IND TECH RES INST +1
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

The surface measuring device is used to measure a surface to be measured

Method used

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  • Surface measuring device and its measuring method and calibration method
  • Surface measuring device and its measuring method and calibration method
  • Surface measuring device and its measuring method and calibration method

Examples

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Embodiment Construction

[0051] The following examples serve as illustrations of the present invention. However, the content provided in the examples is for illustrative purposes only, and the drawn drawings are for illustration purposes, and are not intended to limit the protection scope of the present invention. Furthermore, unnecessary elements are also omitted in the illustrations of the embodiments in order to clearly show the technical characteristics of the present invention.

[0052] Please refer to figure 2 , which is a schematic diagram of a surface measuring device according to an embodiment of the present invention. The surface measuring device 100 is used to measure the surface to be measured 120, wherein the surface measuring device 100 includes a light source 102, a fiber optic tube 104, a first lens group 106, a second lens group 108, an image sensing unit 110, a spectroscopic A mirror 112 and a processing unit 122 . The first lens group 106 includes a third lens group 116 and a pla...

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Abstract

A surface measuring device and its measuring method and calibration method. The surface measurement method includes the following steps. First, a light source emits a light, and the light sequentially passes through a plurality of optical fiber bundles in a fiber tube, a first lens group, a beam splitter and a second lens group to a surface to be measured, and is reflected by the second lens group to The beam splitter is then reflected to an image sensing unit. The first lens group is used for focusing and splitting the light; the image sensing unit captures a measurement image of the light. Next, the light intensity ratios of the plurality of image points in the measurement image are calculated. Then, the light intensity ratio of each image point is compared with a depth-light intensity ratio relationship line to obtain the depth of each image point.

Description

technical field [0001] The invention relates to a surface measuring device, a measuring method and a correction method thereof, and in particular to a surface measuring device capable of generating multi-point light sources, a measuring method and a correction method thereof. Background technique [0002] Please refer to figure 1 (Prior Art), which shows a schematic diagram of a conventional optical detection system. The light field projected by the light source S is focused on different focus positions 13 a , 13 b and 13 c through the dichroic lens 12 . The light projected on the surface to be measured is reflected to the beam splitter 14 and then split to the filter element 15, thereby measuring the height of the same point on the surface to be measured. [0003] However, since the light source S is a point light source, it can only measure the height of the same point on the surface to be measured each time, and only the relative displacement between the light incident ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/30G01B11/24
Inventor 范光照陈亮嘉黄顺洋林宏彝陈来毅
Owner IND TECH RES INST
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