Mono-crystalline furnace vacuum pipe pressure detection alarm system and control method thereof
A vacuum pipeline and vacuum pressure technology, which is applied to vacuum gauges, measuring fluid pressure, measuring devices, etc., can solve the problems of small pressure detection range and achieve the effect of preventing production loss and eliminating potential safety hazards
Active Publication Date: 2013-04-24
TRINA SOLAR CO LTD
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Problems solved by technology
[0002] Existing single crystal furnaces are equipped with a pressure detection port in the exhaust pipeline. The pressure detection port is opened and closed by a hand valve, and a vacuum probe is connected to the pressure detection port. The vacuum probe detects the pressure value below the absolute pressure of 2700Pa. It can be used to control the pressure of the crystal pulling process in the furnace when the equipment is working normally
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[0013] Such as figure 1 As shown, a single crystal furnace vacuum pipeline pressure detection and alarm system includes a vacuum probe 1 and a vacuum pressure sensor 2, the vacuum probe 1 and the vacuum pressure sensor 2 are installed on the pressure detection port through a three-way device 3, the vacuum pressure sensor 2 and the single The crystal furnace alarm output circuit 4 is connected, and when the pressure signal detected by the vacuum pressure sensor 2 exceeds the set high pressure threshold -95.0Kpa, the single crystal furnace alarm output circuit 4 sends out an alarm. The vacuum probe 1 detects the pressure value below the absolute pressure of 2700Pa, which is used for the pressure control of the crystal pulling process in the furnace. The vacuum pressure sensor 2 detects the pressure value from 101KPa to -101KPa of the standard atmospheric pressure, and is a detection component added outside the pressure detection range of the vacuum probe 1 .
[0014] The three-...
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The invention relates to the mono-crystalline furnace detection equipment technology field, especially relates to a mono-crystalline furnace vacuum pipe pressure detection alarm system and a control method thereof. The system comprises: a vacuum probe and a vacuum pressure sensor. The vacuum probe and the vacuum pressure sensor are installed on a pressure detection port through a tee joint apparatus. The vacuum pressure sensor is connected with a mono-crystalline furnace alarm output loop. When the vacuum pressure sensor detects a pressure signal which exceeds a setting high pressure threshold of 95.0 Kpa, the mono-crystalline furnace alarm output loop emits alarm. In the invention, the vacuum pressure sensor is installed to send the alarm immediately when a fault exists in the equipment and causes an abnormal pressure. Production losses caused by the abnormal furnace pressure can be avoided and a potential safety hazard generated when the furnace pressure is high can be eliminated.
Description
technical field [0001] The invention relates to the technical field of single crystal furnace detection equipment, in particular to a single crystal furnace vacuum pipeline pressure detection and alarm system and a control method thereof. Background technique [0002] Existing single crystal furnaces are equipped with a pressure detection port in the exhaust pipeline. The pressure detection port is opened and closed by a hand valve, and a vacuum probe is connected to the pressure detection port. The vacuum probe detects the pressure value below the absolute pressure of 2700Pa. It can be used to control the pressure of the crystal pulling process in the furnace when the equipment is working normally. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a single crystal furnace vacuum pipeline pressure detection and alarm system and its control method, which can alarm in time when the pressure is abnormal. [0004] The...
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IPC IPC(8): G01L21/00
Inventor 马赟
Owner TRINA SOLAR CO LTD