B-C-N ternary hard coating

A B-C-N, hard coating technology, applied in the coating, metal material coating process, ion implantation plating, etc., can solve the problems of B-C-N ternary hard coating widely used barriers, etc., to achieve the effect of improving the bonding performance

Active Publication Date: 2012-01-18
NANTONG TONGZHOU YIDA PORT MACHINERY
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Problems solved by technology

[0004] However, there are still various deficiencies in the control of the composition of the B-C-N ternary coating, the tight adhesion to the substrate,

Method used

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Examples

Experimental program
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Example Embodiment

[0015] Hereinafter, the present invention will be described in detail through specific embodiments.

[0016] A B-C-N ternary hard coating prepared by radio frequency (13.56MHz) magnetron sputtering, specifically prepared by the following steps:

[0017] First, select W6Mo5Cr4V2 high-speed steel as the base material, polish its surface, and clean it with acetone, alcohol, and deionized water in an ultrasonic cleaner for about 10 minutes, and then dry it with nitrogen for use.

[0018] Subsequently, the matrix material is placed on the sample stage in the vacuum chamber, and the Ti target and the graphite / boron composite target are respectively placed at different target positions, wherein the graphite / boron composite target is a ring-shaped boron sleeve Outside the flake graphite, the area ratio of graphite to boron is 2.2:1, the purity of graphite is 99.999%, the purity of boron is 99.9%, and the distance between the graphite / boron composite target and the base material is 8 cm.

[00...

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Abstract

The invention discloses a B-C-N ternary hard coating prepared through radio frequency (13.56MHz) magnetron sputtering. A Ti, TiN and Ti-B-C-N multi-layer transition coating is formed on the surface of a metal matrix to improve the bonding property of the B-C-N hard coating and the metal matrix; meanwhile, a proper graphite/boron composite target and corresponding sputtering process parameters areselected, a high-performance hard coating close to a stoichiometric ratio of BC2N is obtained, the thickness of B-C-N in the coating is about 150nm, the atomic percentage of elements B, C and N on the surface of a film is 23.4, 52.2 and 24.4, and the hardness of the surface is about 15GPa.

Description

technical field [0001] The invention relates to the technical field of a material surface coating, in particular to a B-C-N ternary hard coating. Background technique [0002] According to the structural similarity between diamond and cubic BN (c-BN), it is theoretically expected that B-C-N ternary hard coatings can be synthesized, and it is expected that it can combine the ultra-high hardness of diamond with the high temperature stability and oxidation resistance of c-BN. sex etc. After extensive experimental research, it has been confirmed that the synthesis of B-C-N ternary hard coatings is indeed feasible, and the B-C-N ternary hard coatings do have the same ultra-high hardness as diamond and cubic BN. Compared with hard coatings, it also has incomparable application advantages such as excellent high-temperature chemical stability and low internal stress of the coating. Therefore, B-C-N ternary hard coatings have not only become a research hotspot in the field of hard ...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/34
Inventor 戴圣英
Owner NANTONG TONGZHOU YIDA PORT MACHINERY
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