Measuring device for electrically measuring a flat measurement structure that can be contacted on one side
A measurement device and electrical measurement technology, which is applied in the field of measurement structure, can solve the problems of measurement result distortion, time-consuming, distortion, etc., and achieve the effect of speeding up the connection speed
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[0068] figure 1 A sectional view of an exemplary embodiment of the measuring device 1 according to the invention is shown, the sectional view extending perpendicularly to the carrier element 2 . The carrier element 2 is designed in one piece and has two recesses, figure 1 The sectional view shown in extends through the gap.
[0069] The measuring device has a plurality of switch-on units 3, in figure 1 Two of them (3, 3') are shown in the cross-section shown. The switch-on unit 3 is designed as a spring contact pin with pin 3a, figure 1 The pin in is supported in the cylindrical housing 3b so as to be movable upwards and downwards. The pin 3 a is spring-loaded, so that in the unloaded state the pin moves upwards.
[0070] The switch-on unit 3 is arranged on the bottom element of the first vacuum chamber 4 . The vacuum chamber is delimited upwards by the support element 2 and downwards by said bottom element. The vacuum chamber is sealed laterally by bellows-shaped eleme...
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