Grinding tool capable of actively compensating surface shape abrasion errors and compensating method thereof

Abstract

The invention discloses a grinding tool capable of actively compensating surface shape abrasion errors and a compensating method thereof, belonging to the technical field of ultra-precision machining. The device disclosed by the invention actively compensates the surface shape errors of a grinding tool by use of a built-in piezoelectric ceramic array, wherein the piezoelectric ceramic array consists of a piezoelectric ceramic unit and a voltage signal input terminal; the piezoelectric ceramic array is arranged in the grinding tool; and the voltage signal input terminal is arranged between the piezoelectric ceramic array and a base body of the grinding tool. The method disclosed by the invention comprises the following steps of: uniformly placing the piezoelectric ceramic array in the grinding tool; and applying a certain DC (direct current) voltage signal to the piezoelectric ceramic in a corresponding position according to the initial surface shape or abrasion condition of the grinding tool, so that the piezoelectric ceramic generates corresponding telescopic deformation to force the surface shape of the grinding tool to change, thereby achieving the aim of adjusting the current surface shape of the surface of the grinding tool. The grinding tool disclosed by the invention has a simple structure and a high mechanical integration degree, is stable and reliable, and has broad application prospects in precision machining, and particularly in surface shape machining.

Description

technical field [0001] The invention relates to a grinding tool and a method for actively compensating surface wear errors, and belongs to the technical field of ultra-precision machining. Background technique [0002] The processing of ultra-precision devices requires that the material density be highly consistent and the nanometer precision of the size, waviness, and roughness be achieved at the same time. When using traditional material removal methods, it is difficult to achieve ultra-low stress and difficult to achieve material removal under ultra-low stress. . With grinding as the basic processing method, it is necessary to achieve nano-scale dimensional accuracy, surface accuracy, surface waviness, surface roughness, and have good surface quality, small surface metamorphic layer, small residual stress, and meet surface integrity requirements , in addition to the need for the grinding machine to provide a feed that is better than nanometer precision, and accurately co...

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is aiming at the defects of traditional error compensation, and proposes an abrasive tool that can actively compensate surface wear error and its surface wear error compensation method, so as to realize high-efficiency, low-cost, stable and reliable nano-precision manufacturing

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