Method for measuring surface shape of turned center opening mirror by contact type contourgraph
A profiler and contact technology, applied in the fields of inspection and ultra-precision optical processing, can solve problems such as incomplete representation, and achieve the effect of avoiding the influence of stress
Inactive Publication Date: 2013-11-06
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology
Therefore, the surface shape of the turning test tool cannot fully represent the surface shape of the center hole mirror
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[0020] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0021] A kind of method of the present invention realizes the mirror surface shape of the central opening of the contact profiler measuring the turning, such as image 3 As shown, before processing the center hole mirror 1 on a single point diamond lathe, a release agent 5 is first applied to the inner hole of the mirror. Next, fill the opening of the mirror body with a filling block 3 whose outer diameter is slightly smaller than the central aperture of the mirror body and which is fixed on the processing tooling, and fill the opening of the mirror body with a filler 4 that is stored in a liquid or paste state and can be cured in air. The gap between the hole and the filling block. The cured filler has a certain strength and hardness within the range of the filling gap, and is suitable for turning with a diamond turning tool. The release agent...
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The invention provides a method for measuring a surface shape of a turned center opening mirror by a contact type contourgraph. In the method, a center hole of a mirror body (1) is filled by filling blocks (3) fixed on a processing tool; in order to ensure that a contact probe (2) of the contourgraph does not drop into the clearance between the hole of the mirror body and the filling blocks, the clearance is filled by a filling agent (4) which can be cured in the air; the cured filling agent has certain strength and hardness within the filling range and is suitable for the turning of a diamond turning tool; in order to isolate the tensile stress of the filling agent against the mirror body during the curing, an isolating agent (5) is coated on the inner hole part of the mirror body firstly; and after the center opening mirror, the filling blocks and the cured filling agent are all turned until the finish turning is finished, a complete mirror surface without pores is formed, and the contourgraph can position the axle center O of the mirror surface to realize comparative measurement of a theoretical surface shape. The method provided by the invention is suitable for the processing and detection processes in which the contact type contourgraph assists a single-point diamond in turning the center opening mirror.
Description
technical field [0001] The invention belongs to the field of ultra-precision optical processing and detection, and particularly relates to a method for realizing the measurement of the mirror surface shape of a central opening of turning by a contact profiler. Background technique [0002] Computer numerical control single-point diamond turning technology (SPDT) is an optical parts processing technology that was popularized and applied in the 1980s. It directly uses diamond tool single-point turning on an ultra-precision lathe to process optical parts that meet optical quality requirements. Using the diamond turning process, the processing cost and cycle time are significantly lower than those of the fine grinding and polishing method. [0003] In the process of turning optical parts on diamond lathes, it is usually necessary to measure the surface shape of the workpiece through relevant testing equipment to evaluate the processing effect, and provide feedback for the proce...
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IPC IPC(8): B23Q17/20B23B1/00
Inventor 龙波时全领邢廷文廖胜
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI