Annular resonant cavity temperature drift compensation method and system thereof
A ring resonant cavity, temperature drift technology, applied in the field of integrated optoelectronics, can solve the problems of red shift of the resonant wavelength of the resonant cavity, unable to work normally, etc., to ensure the effect of process compatibility
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Embodiment 1
[0077] Such as Figure 5 The structure of the resonant cavity is composed of mutually coupled straight waveguides and a single ring waveguide, and the method of this embodiment includes the following steps:
[0078] S101: Obtain the temperature raised by the resonant cavity, and calculate the change amount of the redshift of the resonant wavelength of the resonant ring due to the temperature increase; taking a single-mode silicon waveguide with a width of 500nm as an example, the effective refractive index changes with temperature for When the temperature rises by 5°C, the effective refractive index of the waveguide changes by Δn eff =1.04×10-3, determined by formula (1)(2) "red shift" Δλ=0.653nm;
[0079] S102: Determine the equivalent structure of the resonant cavity coupling region according to the structure of the resonant cavity, and determine the effective resonance on the resonant ring that can cause the resonant wavelength to blue shift according to the equivalent s...
Embodiment 2
[0094] Such as Figure 8 As shown, the structure of the resonant cavity is composed of sequentially coupled straight waveguides, a first ring waveguide and a second ring waveguide, and the method of this embodiment includes the following steps:
[0095] S201: Obtain the temperature raised by the resonant cavity, and calculate the change amount of the redshift of the resonant wavelength of the resonant ring due to the temperature rise; taking a single-mode silicon waveguide with a width of 500 nm as an example, the effective refractive index changes with temperature for When the temperature rises by 5°C, the effective refractive index of the waveguide changes by Δn eff =1.04×10-3, determined by formula (1)(2) "red shift" Δλ=0.653nm;
[0096] S202: Determine the equivalent structure of the resonant cavity coupling region according to the structure of the resonant cavity, and determine an effective resonance on the resonant ring that can blue-shift the resonant wavelength acco...
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