Imaging system using plane mirror to integrate lights and optical measuring device

A flat mirror and imaging system technology, applied in the field of optical measurement, can solve problems such as high cost, chromatic aberration, and difficulty in realizing efficient illumination of detection spots, and achieve the effect of low cost and simple structure
CN102455511BInactive Publication Date: 2013-05-22INST OF MICROELECTRONICS CHINESE ACAD OF SCI +1
6 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
Publication Date
2013-05-22
Estimated Expiration
Not applicable · inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention belongs to the technical filed of optical measurement, and more particularly relates to an imaging system using a plane mirror to integrate lights and an optical measuring device. The imaging system comprises an imaging light-gathering unit, an image detector and a first removable reflecting mirror, wherein a first light beam is emitted to a sample, and a second light beam is transmitted to the sample through the first removable reflecting mirror, the light reflected from the surface of the sample is imaged on the image detector by the imaging light-gathering unit, the first removable reflecting mirror is positioned in or out of a system light path so that the first light beam and the second light beam are superposed or separated, and through adjusting the removable reflecting mirror, identification and positioning of measuring points and position calibration and measurement of sample surface measuring points and detection light beam light spots can be realized. According to the invention, self characteristics such as luminous flux, chromatism, aberration, polarization and the like of a detection light path are completely not affected, thus imaging without double images can be realized; and in addition, the structure is simple and the cost is low.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to the technical field of optical measurement, and in particular to an imaging system and an optical measurement device that combine light using a plane mirror. Background technique

[0002] In the optical measurement system, it is usually necessary to observe the surface structure of the target sample and the shape and position of the probe beam on the sample surface; imaging system. To realize the measurement of the specified position on the sample surface, the imaging system is required to be able to simultaneously observe the sample surface structure and the position of the probe beam spot on the sample surface, so as to realize the calibration of the probe beam and the specified measurement position. In addition, the imaging system with integrated image recognition function can realize the automatic recognition and calibration of the same repeated structure on the sample surface, so as to realize the automation of measuremen...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More