Device for depositing semiconductor film on flexible substrate

Abstract

The invention relates to a device for depositing a semiconductor film on a flexible substrate. The device contains a reaction tank, a reaction solution and a web-like flexible substrate. Two reels are vertically fixed on the bottom of the reaction tank close to the inner wall of the reaction tank. A flexible substrate surface between the two reels is wound on the whole fixed shaft so as to form the flexible substrate with a snake-like transverse plane. According to the invention, the flexible substrate is wound into the fixed shaft with the transverse plane being snake-like, the reels are driven by a motor to transfer the flexible substrate in a snake-like movement from one reel to another rotating shaft in the reaction solution. Therefore, long-distance substrate is placed in the reaction tank so as to effectively increase the deposition area of the substrate, fully utilize the reaction solution and make the flexible substrate to fully deposit in the reaction solution to form the semiconductor film with good uniformity. In addition, the device provided by the invention has a simple structure, requires low manufacturing cost and can be produced at large scale.

Description

technical field [0001] The invention belongs to the technical field of devices for manufacturing semiconductor thin films, in particular to a device for depositing semiconductor thin films on a flexible substrate. Background technique [0002] CdS thin film, ZnS thin film, CdTe thin film, In 2 S 3 thin film, CuInS 2 thin film, CuInSe 2 thin film, Cu 2 Thin films such as S thin films are widely used in semiconductor devices such as thin film solar cells. Such as CdTe film, CuInS 2 thin film, CuInSe 2 thin film, Cu 2 S thin film can be used as the absorbing layer of solar cells, and its function can absorb photons and convert them into photogenerated carriers; while CdS thin film, ZnS thin film, In 2 S 3 Thin films can be used as n-type layer or buffer layer of solar cells. The methods used to prepare these thin films are: vacuum evaporation method, sputtering method, molecular beam epitaxy, chemical bath, etc. The first three methods generally require high temperat...

AI Technical Summary

Problems solved by technology

[0003] Existing chemical bath devices for preparing semiconductor thin films are mostly used on rigid substrates such as glass, and cannot deposit semiconductor thin films on rolls of flexible substrates

However, the devices for preparing semiconductor thin films on flexible substrates are mostly roll-to-roll designs, the equipment structure is complex, the reaction solution is not fully utilized, and the uniformity of deposited films on moving substrates is poor. Large-scale deposition of semiconductor thin films on flexible substrates very high cost

Images