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Optical microcavity biochemical sensor

A biochemical sensor and optical microcavity technology, applied in the field of optical sensing, can solve the problems of demanding sensor technology and achieve the effects of process compatibility, lower process requirements, and low resolution requirements

Inactive Publication Date: 2012-06-20
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This makes the preparation of the sensor very demanding on the process

Method used

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Examples

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Effect test

Embodiment 1

[0040] refer to figure 1 , the present invention is a high-sensitivity sensor based on the coupling of a 3dB optical beam splitter and an optical microring, comprising a first 3dB optical beam splitter 1, a second 3dB optical beam splitter 4, a sensing microring 2, A reference microring 3 , a sample well 5 and a reference well 6 . Wherein the sensing microring 2 is located in the sample groove 5 , and the reference microring 3 is located in the reference groove 6 . The incident light is input by the first 3dB optical beam splitter 1, and is coupled with the sensing microring 2 and the reference microring 3 after beam splitting; the light coupled into the sensing microring 2 and the reference microring 3 is respectively coupled with the second The straight waveguides on both sides of the 3dB optical beam splitter 4 are coupled to each other, and are output as sensing signals after interference. Taking the SOI material as an example, the cross-sectional size of the waveguide i...

Embodiment 2

[0062] refer to figure 1 , the present invention is a high-sensitivity sensor based on the coupling of a 3dB optical beam splitter and an optical microring, comprising a first 3dB optical beam splitter 1, a second 3dB optical beam splitter 4, a sensing microring 2, A reference microring 3 , a sample well 5 and a reference well 6 . Wherein the sensing microring 2 is located in the sample groove 5 , and the reference microring 3 is located in the reference groove 6 . The incident light is input by the first 3dB optical beam splitter 1, and is coupled with the sensing microring 2 and the reference microring 3 after beam splitting; the light coupled into the sensing microring 2 and the reference microring 3 is respectively coupled with the second The straight waveguides on both sides of the 3dB optical beam splitter 4 are coupled to each other, and are output as sensing signals after interference. Taking the SOI material as an example, the cross-sectional size of the waveguide i...

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Abstract

An optical microcavity biochemical sensor comprises a first 3dB light splitter, a second 3dB light splitter, a sensing microcavity, a reference microcavity, a sample groove and a reference groove. One side of the sensing microcavity is coupled with a port 1 of the first 3dB light splitter, the other side of the sensing microcavity is coupled with a port 1 of the second 3dB light splitter, one side of the reference microcavity is coupled with a port 2 of the first 3dB light splitter and the other side of the reference microcavity is coupled with a port 2 of the second 3dB light splitter, the sample groove is used for containing the sensing microcavity, and the reference groove is used for containing the reference microcavity. Besides, free spectral ranges of the sensing microcavity and the reference microcavity are different, and incident light is input from the first 3dB light splitter, is split and then coupled with the sensing microcavity and the reference microcavity respectively. The two light beams coupled into the sensing microcavity and the reference microcavity are respectively coupled into the port 1 and the port 2 of the second 3dB light splitter and are interfered by the second 3dB light splitter so as to be output as sensing signals.

Description

technical field [0001] The invention relates to the field of light sensing, in particular to a high-sensitivity optical microcavity biochemical sensor. Background technique [0002] Chemical and biological sensors have been widely used in various fields such as aerospace, aviation, national defense, science and technology, and industrial and agricultural production. Optical sensor is an important part of sensing technology. Its basic principle is: the measured substance interacts with the light field, so that some parameters of the light field (such as wavelength, phase, light intensity, polarization, etc.) change. [0003] Integrated optical waveguide sensors have the advantages of anti-electromagnetic interference, resistance to harsh environments (such as high temperature, nuclear radiation, etc.), high sensitivity, good selectivity, fast response, and easy integration. They are widely used in clinical medicine, bioengineering, food industry, and environmental pollution. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/26G01N21/41
Inventor 张晓光吴远大王玥张家顺安俊明王红杰李建光胡雄伟
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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