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Method for diagnosing long-life electron metastable state of N2 in air plasma

A plasma, long-life technology, used in material excitation analysis, fluorescence/phosphorescence, etc., can solve the problems of complex calibration process, increase equipment complexity and experimental cost, and achieve high sensitivity and simplify diagnostic equipment.

Inactive Publication Date: 2014-06-18
DALIAN UNIV OF TECH
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  • Application Information

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Problems solved by technology

However, this experimental scheme makes the calibration process extremely complicated, and although this scheme has high sensitivity, it usually requires two tunable dye lasers, one for pumping A State and B State species, greatly increasing equipment complexity and experiment cost

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  • Method for diagnosing long-life electron metastable state of N2 in air plasma
  • Method for diagnosing long-life electron metastable state of N2 in air plasma
  • Method for diagnosing long-life electron metastable state of N2 in air plasma

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Embodiment Construction

[0031] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

[0032] 1. Diagnosis principle: Plasma can be generated in several ways that are common in industry, such as dielectric barrier discharge (Dielectric Barrier Discharge, DBD), corona discharge (Corona Discharge), radio-frequency discharge (Radio-Frequency Discharge), pulse discharge (Pulsed Discharge) and so on. Due to the universality of the experimental protocol, it is in principle applicable to nitrogen metastable states in any nitrogen-containing plasma A 3 Σ u + There is no absolute requirement for the specific plasma generation method for the diagnostic study of the state, but specific operations such as experimental timing and signal-to-noise ratio optimization will vary due to different plasma generation methods.

[0033] N in the diagnostic plasma 2 A 3 Σ u + state, the current LIF method is used to measure A 3 Σ u + The solution ...

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Abstract

The invention discloses a method for diagnosing a long-life electron metastable state of N2 in air plasma. The method comprises the following steps of: A, emitting laser beams to a plasma to be detected, wherein the wavelength of the laser beams is resonant wavelength in which different vibrations levels of an A3sigma+ state are pumped to a C3pi state; B, collecting radio fluorescence signals which are excited from the C3pi state back to a B3pi state; and C, measuring the radio fluorescence signals to obtain distribution information of various vibration levels of the A3sigma+ state. According to the method, the concentration of N2 in the A3sigma+ state is measured through two-photon absorption, high sensitivity can be kept, and diagnostic equipment is simplified.

Description

technical field [0001] The invention relates to the field of gas detection, in particular to a method for diagnosing N in air plasma 2 A method for long-lived electronic metastable states. Background technique [0002] The plasma formed by air-containing discharge generally contains electrons, ions (N + , O + , H + , N 2 + , O 2 + ), atoms (N, O, H), molecules (N 2 , O 2 , H 2 O, CO 2 ), free radicals (OH, HO 2 , NH) and long-lived electronic metastable N 2 ( A 3 Σ u + )Wait. The energy transfer, adsorption, desorption, sputtering and chemical reactions caused by the collisions between these species and electrodes, walls, workpieces or substrate surfaces will trigger a series of extremely complex physical-chemical processes that are difficult to carry out by conventional means. process. At first, free radicals were considered to be the main active species that initiate various chemical reaction processes, so more diagnostic research on free radicals was ca...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/64
Inventor 丁洪斌冯春雷高亮李聪
Owner DALIAN UNIV OF TECH