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Bionic three-dimensional angular speed sensor based on moth tentacle navigation and preparation method thereof

A technology of angular velocity sensor and tentacles, which is applied in the field of bionic three-dimensional angular velocity sensor, can solve the problems of large measurement error and complex structure of navigation system, and achieve the effect of reducing measurement error and simple structure

Inactive Publication Date: 2012-06-27
ZHONGBEI UNIV
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Problems solved by technology

[0003] In order to solve the problems in the existing navigation system that the micromechanical gyroscope can only detect the angular velocity in a single direction, the structure of the navigation system is complex and the measurement error is large, the invention provides a bionic three-dimensional angular velocity detection sensor based on moth antennae navigation

Method used

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  • Bionic three-dimensional angular speed sensor based on moth tentacle navigation and preparation method thereof
  • Bionic three-dimensional angular speed sensor based on moth tentacle navigation and preparation method thereof
  • Bionic three-dimensional angular speed sensor based on moth tentacle navigation and preparation method thereof

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Embodiment Construction

[0027] A bionic three-dimensional angular velocity sensor based on moth antennae navigation, including N-type [100] double-polished silicon wafers, and plexiglass 1. The plexiglass 1 has a central square hole, and the top of the plexiglass 1 has four ends and the center symmetrically. A groove 3 with a square hole communicating and perpendicular to the edge of the hole, in which a soft magnet 5 with a coil 4 is bonded; the bottom of the plexiglass 1 is provided with a first square groove with the same center as the central square hole. There is a second square groove 6 in a square groove; N-type [100] double-throwing silicon wafer is bonded in the first square groove, and N-type [100] double-throwing silicon wafer includes a hollow frame 11 and four Folding beam 9, one end of all folding beams 9 is symmetrically fixed on the side of the hollow frame 11 and the other ends are fixed together in the center of the hollow frame 11 to form a central support plate; the central support ...

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Abstract

The invention relates to a bionic three-dimensional angular speed sensor, in particular to a bionic three-dimensional angular speed sensor based on moth tentacle navigation and a preparation method of the three-dimensional angular speed sensor. Problems that a micromechanical gyroscope in an existing navigation system only can detect angular speed in a single direction, so that the navigation system is complex in structure, and measurement errors are high are solved. The bionic three-dimensional angular speed sensor based on moth tentacle navigation comprises an N-type (100) double-polished silicon wafer and organic glass, a center square hole is arranged on the organic glass, four grooves are symmetrically arranged at the top of the organic glass, flexible magnets wound with coils are adhered in the grooves, a first square groove is arranged at the bottom of the organic glass, and the N-type (100) double-polished silicon wafer is adhered in the first square groove, and comprises a hollow frame and four foldable beams. A single structure is used for completing detection of three-dimensional angular speed, so that the bionic three-dimensional angular speed sensor is simple in structure, and can be widely applicable to detecting angular speed in the field of bionic MEMS (micro-electromechanical system) sensors.

Description

Technical field [0001] The invention relates to a bionic three-dimensional angular velocity sensor, in particular to a bionic three-dimensional angular velocity sensor based on moth antennae navigation and a preparation method thereof. Background technique [0002] Bionics is a bridge connecting biology and technology. In recent years, human inventions and innovative technologies on bionics have been fruitful; people invented fluorescent lamps through the study of the light-emitting mechanism of fireflies; explored the mystery of electric fish discharge and invented the earliest The volt battery; through the exploration of the skin structure of the giraffe, the flight suit-the "anti-G suit" was developed; but the research on the bionic navigation technology is scarce. At present, the core component of the navigation system, the micromachined gyroscope, can only detect angular velocity information in a single direction. For the measurement of three-dimensional space attitude, the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P3/44
Inventor 刘俊唐军石云波李杰张晓明刘尧郭浩温焕飞
Owner ZHONGBEI UNIV
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