Bionic three-dimensional angular speed sensor based on moth tentacle navigation and preparation method thereof
A technology of angular velocity sensor and tentacles, which is applied in the field of bionic three-dimensional angular velocity sensor, can solve the problems of large measurement error and complex structure of navigation system, and achieve the effect of reducing measurement error and simple structure
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[0027] A bionic three-dimensional angular velocity sensor based on moth antennae navigation, including N-type [100] double-polished silicon wafers, and plexiglass 1. The plexiglass 1 has a central square hole, and the top of the plexiglass 1 has four ends and the center symmetrically. A groove 3 with a square hole communicating and perpendicular to the edge of the hole, in which a soft magnet 5 with a coil 4 is bonded; the bottom of the plexiglass 1 is provided with a first square groove with the same center as the central square hole. There is a second square groove 6 in a square groove; N-type [100] double-throwing silicon wafer is bonded in the first square groove, and N-type [100] double-throwing silicon wafer includes a hollow frame 11 and four Folding beam 9, one end of all folding beams 9 is symmetrically fixed on the side of the hollow frame 11 and the other ends are fixed together in the center of the hollow frame 11 to form a central support plate; the central support ...
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