Three-dimensional fluid stress sensor based on flexible MEMS (microelectromechanical system) technology and array thereof

Abstract

The invention discloses a three-dimensional fluid stress sensor based on a flexible MEMS (microelectromechanical system) technology and an array thereof. The three-dimensional fluid stress sensor based on the flexible MEMS technology comprises a capacitive pressure stress sensor and a hot shearing stress sensor, wherein the capacitive pressure stress sensor comprises an upper electrode plate in an upper electrode layer, a pressure stress-sensitive film, and a lower electrode plate in a lower electrode layer; a cavity structure of the pressure stress sensor is formed in a supporting structurallayer; the hot shearing stress sensor consists of four groups of double hot-wire resistors which are in a square arrangement; and a hot-wire resistance signal is led from a flexible substrate into a detection circuit through a wire leading post. The three-dimensional fluid stress sensor is based on a flexible substrate technology and a back wire leading technology, and adopts an MEMS processing technology and a bonding technology; the magnitude of the pressure stress of a fluid is measured through the change of a capacitive signal; the magnitude and the direction of a two-dimensional shearingstress within a plane are measured through the change of the double hot-wire resistance; the capacitive signal and a shearing stress signal are led into the detection circuit and do not interfere with each other; and the three-dimensional fluid stress sensor based on the flexible MEMS technology has the advantages of relatively high resolution, small volume, and batch processing at low cost.

Description

Technical field [0001] The invention relates to a fluid stress sensor in the field of fluid dynamics, in particular to a three-dimensional fluid stress sensor based on flexible MEMS technology and an array thereof. Background technique [0002] Currently, active flow control of objects in the flow field is one of the research hotspots in fluid mechanics, especially in the field of vehicle dynamics. When the vehicle is sailing, the boundary layer of the object surface develops from laminar flow to turbulent flow. The random velocity disturbance in the turbulent boundary layer will cause resistance and dynamic noise to the vehicle. Active control of the turbulent boundary layer flow field on the surface of the moving object can improve the dynamic performance of the aircraft while reducing noise radiation, which greatly improves the performance of the entire aircraft system. Therefore, fluid control has become today’s fluid mechanics. Research hotspots. The micro fluid stress sen...

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Problems solved by technology

[0004] Aiming at the deficiencies in the prior art, the present invention provides a three-dimensional fluid stress sensor and its array based on flexible MEMS technology, which has the advantages of high resolution, small volume, and low-cost batch processing, and solves the problem of flexible substrates and The problem of signal backline lead-in, and can meet the measurement requirements of three-dimensional fluid stress in fluid dynamics

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