Control method and control device of stepping motor, matcher and plasma processing device
A technology of stepper motor and control method, applied in the direction of motor generator control, control system, circuit, etc., can solve the problems of nonlinear load instability, stepper motor out-of-step, delay, etc., to reduce lost steps and out-of-step phenomenon, the effect of improving accuracy and improving service life
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[0053] In order for those skilled in the art to better understand the technical solution of the present invention, the control method of the matcher, the matcher and the plasma processing equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0054] The matching device provided in this embodiment includes a sensor, a controller and an actuator. The sensor is used to detect the voltage, current, forward power, and reverse power on the radio frequency transmission line. The controller obtains the actual rotation direction signal according to the detection value detected by the sensor. , the actuator is implemented by a stepper motor, which performs a matching operation according to the actual rotation direction signal obtained by the controller.
[0055] image 3 It is a flowchart of a control method for a stepping motor. see image 3 , the control method of the stepper motor includes:
[0056] Step s1, obt...
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