Device and method for measuring micro-pore size based on fiber Bragg grating

Abstract

The invention provides a device and method for measuring a micro-pore size based on a fiber Bragg grating and belongs to the technical fields of precision instrument manufacture and precision test metering. The device consists of an aiming and signaling device for generating aiming signals, a length measuring device for measuring the movement distance of a micro-pore to be measured within a time interval of measuring measurement starting and stopping signals which are sent by the aiming and signaling device, and a computer for controlling a measurement process of the entire measuring device. The method comprises the following steps of: continuously moving a working table along a direction vertical to a length measurement direction, and moving the working table along a measurement line to obtain a maximum displacement, relative to the micro-pore to be measured, of a probe, so as to obtain the diameter of the micro-pore to be measured. According to the device and method disclosed by the invention, the adaptability of the aiming and signaling device to the environment is greatly improved. The device disclosed by the invention has the characteristics of simple structure, good real-time capability and easiness for actual application, and has obvious advantage of carrying out rapid and ultra-precise measurement and aiming on the size of the micro-pore.

Description

technical field [0001] The invention belongs to the technical field of precision instrument manufacture and measurement, and in particular relates to a micropore size measuring device and method based on an optical fiber Bragg grating. Background technique [0002] With the continuous development of the aerospace industry, automobile industry, electronics industry and cutting-edge industries, the demand for precision micro-cavity components has increased dramatically. Due to the limitation of the space scale and the influence of the measurement contact force, the precise measurement of the inner dimensions of the tiny inner cavity components has become difficult to achieve, especially the measurement depth is difficult to increase, which has become a "bottleneck" restricting the development of the industry. In order to achieve smaller internal dimension measurement and increase the measurement depth, the most widely used method is to use a slender probe to probe deep into th...

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Problems solved by technology

[0013] 2. The real-time performance of the detection system is poor, and it is difficult to achieve precise online measurement

[0014] 3. Insufficient detection ability of two-dimensional displacement direction

The one-dimensional micro-focus alignment measurement method proposed by Harbin Institute of Technology based on single-fiber probe measuring rod has coupling in two-dimensional displacement sensing. When the measured displacement is a two-dimensional position, the two-dimensional information obtained by this method There is a correlation between them, and they cannot be separated, resulting in a large error in the two-dimensional measurement, and the accurate measurement of the two-dimensional displacement cannot be realized

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