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Thermosetting protective solution for glass mask, and glass mask

A glass mask, thermal curing technology, applied to the glass mask. It can solve the problems of lower exposure accuracy and achieve the effects of improved exposure accuracy, high hardness, and whitening prevention

Active Publication Date: 2014-07-30
KIMOTO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, sticking such a surface protection film has problems such as a decrease in exposure accuracy due to the thickness of the surface protection film, and a decrease in exposure accuracy due to air bubbles and the like during attachment.

Method used

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  • Thermosetting protective solution for glass mask, and glass mask
  • Thermosetting protective solution for glass mask, and glass mask
  • Thermosetting protective solution for glass mask, and glass mask

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1～5

[0063] [Examples 1-5, Comparative Examples 1-3 and Reference Example 1]

[0064] The glass mask thermosetting type protective solution of Examples 1 to 5, Comparative Examples 1 to 3 and Reference Example 1 composed of the following Table 1 is coated on the patterned latex mask by spin coating, and heated at 150 ° C, It was heated and cured for 70 minutes to form a protective film with a thickness of about 2 μm, and the glass masks of Examples 1 to 5, Comparative Examples 1 to 3, and Reference Example 1 were produced.

[0065]

[0066] In addition, in the above example, silicone resin 1 (X-40-2308: Shin-Etsu Chemical Co., Ltd., solid content 100%), silicone resin 2: epoxy-modified silicone resin (ES-1001N: Shin-Etsu Chemical Co., Ltd. Industrial Co., Ltd., solid content 45%), silicone resin 3: ester-modified silicone resin (KR5235: Shin-Etsu Chemical Co., Ltd., solid content 60%), silicone resin 4: acrylic modified silicone resin (KR9706: Shin-Etsu Chemical Industry Co., L...

Embodiment 5

[0081] In the glass mask of Example 5, since the ratio of the novolac-type epoxy resin in an epoxy resin was 30 weight% or more, whitening did not occur in a protective film. In addition, since the weight ratio of the silicone resin to the epoxy resin is in the range of 4:6 to 8:2, cracks are not generated, and sufficient surface hardness is obtained as a protective film. However, since the thermosetting type protective solution for glass masks of Example 5 contains an amine catalyst and a metal alkoxide catalyst as a curing agent, there is a problem in solution storage stability.

reference example 1

[0085] The glass mask of Reference Example 1 has a lower haze than the glass masks of Comparative Examples 1 to 3 because the proportion of novolak-type epoxy resin in the epoxy resin is less than 30% by weight, but the protection is seen. Blanching of the membrane.

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PUM

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Abstract

Disclosed is a thermosetting protective solution for a glass mask, which exhibits good adhesion to a glass mask. When the thermosetting protective solution for a glass mask is formed into a protective film, the protective film has excellent hardcoat properties, while being free from cracks and capable of preventing the whitening of the coating film due to the incompatibility between an epoxy resin and a silicone resin. In addition, the thermosetting protective solution for a glass mask has improved storage stability since the protective solution only contains an amine compound as a curing agent. Specifically disclosed is a thermosetting protective solution for a glass mask, which contains a silicone resin, an epoxy resin and a silicone oil. A phenolic novolac epoxy resin is contained as the epoxy resin. The thermosetting protective solution for a glass mask additionally contains an amine compound but does not contain any metal alkoxide catalyst, as a curing agent.

Description

technical field [0001] The present invention relates to a thermosetting protective liquid for glass masks, and more particularly to a thermosetting protective liquid for glass masks which is excellent in transparency when formed into a protective film, and to a glass mask provided with a transparent protective film. Background technique [0002] A printed wiring board or a resin relief plate is manufactured by attaching a photomask (original for exposure) to an adhesive photoresist film such as a liquid photoresist film and exposing it. Therefore, if the surface of the photomask is not subjected to any treatment, when the photomask is peeled off from the photoresist film after exposure, a part of the photoresist film adheres to the photomask surface, and even if it is wiped, it will Residues on the photomask cause a problem of lowering exposure accuracy. Starting from such a situation, a surface protection film with release properties has been provided on the photomask oppo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F1/48C08G59/08C08L63/00C08L83/10
CPCC08L83/10C08K5/5419C08G59/08C08L63/00G03F1/48
Inventor 长谷川刚栗岛进
Owner KIMOTO CO LTD