Method for treating waste gas containing spontaneously-combustive gas

A technology for waste gas treatment and spontaneous combustion, which is applied in separation methods, chemical instruments and methods, and dispersed particle separation. It can solve the problem of high equipment cost, avoid energy consumption, improve treatment efficiency, and simplify treatment equipment.

Inactive Publication Date: 2012-08-15
KUN SHAN UNIVERSITY
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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for treating waste gas containing pyrophoric gas with low energy consumption and low equipment cost, so as to solve the problems of high energy consumption and high equipment cost in high-temperature heating or high-temperature combustion treatment in the prior art

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  • Method for treating waste gas containing spontaneously-combustive gas
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  • Method for treating waste gas containing spontaneously-combustive gas

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Embodiment Construction

[0019] In order to further explain the technical solution of the present invention, the present invention will be described in detail below through specific embodiments and accompanying drawings.

[0020] see figure 1 , which is a schematic diagram of a prior art waste gas treatment method containing pyrophoric gas. In the figure, industrial waste gas includes process waste gas containing high concentration of pyrophoric gas and process waste gas containing low concentration of pyrophoric gas. The process waste gas containing high concentration of pyrophoric gas can be burned without adding gas in the existing technology If the combustion is incomplete, process waste gas containing low-concentration self-igniting gas will be formed, and then treated by high-temperature heating oxidation or high-temperature combustion oxidation; process waste gas containing high-concentration self-igniting gas can also be directly oxidized by high-temperature heating or It is processed by high...

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Abstract

The invention discloses a method for treating waste gas containing spontaneously-combustive gas. A stability product can be generated by enabling an oxidant and spontaneously-combustive gas to have an oxidization-reduction reaction, so as to solve the problems in the prior art that the energy consumption is high and the cost of treating equipment is high by taking high-temperature heating oxidization or high-temperature combustion oxidization as a treating manner. The method for treating waste gas containing the spontaneously-combustive gas disclosed by the invention can provide a novel waste gas treating method of an industry of science and technology.

Description

technical field [0001] The invention relates to a waste gas treatment method, in particular to a waste gas treatment method containing pyrophoric gas. Background technique [0002] Silyl methane is a colorless gas, which is spontaneously ignitable. At present, silyl methane is a special gas widely used in the semiconductor industry. Nowadays, for the process waste gas containing pyrophoric gas, because the process gas contains nitrogen trifluoride (NF3) or hexafluoride Sulfur (SF6) and other chamber clean gases are mainly oxidized with oxygen by high-temperature heating or high-temperature combustion to reduce the impact of process exhaust gas on human health and the environment. However, when the process exhaust gas does not contain chamber clean gases such as nitrogen trifluoride or sulfur hexafluoride, the current solar cell process equipment system is still oxidized by high-temperature heating or high-temperature combustion with oxygen. In fact, these process waste gase...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/78B01D53/48
Inventor 李昆池
Owner KUN SHAN UNIVERSITY
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