Molybdenum disulfide titanium nitride composite film and preparation method thereof
A technology of molybdenum disulfide and composite film, applied in chemical instruments and methods, ion implantation plating, coating and other directions, can solve the problem of difficult long-term preservation of molybdenum disulfide, easy contact with air and water, poor adhesion and density, etc. problem, to achieve the effect of simple structure, simple production and low cost
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Embodiment 1
[0022] A molybdenum disulfide-titanium nitride composite film, the composite film respectively includes a titanium diffusion transition layer 1, a titanium nitride support layer 2 and a molybdenum disulfide titanium nitride composite layer 3 from bottom to top, and the thickness of the titanium diffusion transition layer is The thickness of the titanium nitride support layer is 500nm, and the thickness of the molybdenum disulfide titanium nitride composite layer is 1000nm.
[0023] A kind of preparation method of molybdenum disulfide titanium nitride composite thin film, the steps that its preparation method comprises are as follows:
[0024] (1) Open the equipment: put the carrier for preparing the film on the turntable in the vacuum chamber, so that the pressure of the vacuum chamber is 10 -2 Pa, start to heat up, and keep the temperature at 70°C; continue to vacuumize to less than 6×10 -3 Pagoda; Start the turntable, turntable speed 1 rev / min; The carrier that the present ...
Embodiment 2
[0032] A molybdenum disulfide-titanium nitride composite film, the composite film respectively includes a titanium diffusion transition layer, a titanium nitride support layer and a molybdenum disulfide titanium nitride composite layer from bottom to top, the thickness of the titanium diffusion transition layer is 1300nm, The thickness of the titanium nitride support layer is 800nm, and the thickness of the molybdenum disulfide titanium nitride composite layer is 1800nm.
[0033] A kind of preparation method of molybdenum disulfide titanium nitride composite thin film, the steps that its preparation method comprises are as follows:
[0034] (1) Open the equipment: put the carrier for preparing the film on the turntable in the vacuum chamber, so that the pressure of the vacuum chamber is 10 -2 Pa, start to heat up, and keep the temperature at 200°C; continue to vacuumize to less than 6×10 -3 Start the turntable, the turntable speed is 3 rev / min; the carrier for preparing the f...
Embodiment 3
[0042] A molybdenum disulfide-titanium nitride composite film, the composite film respectively includes a titanium diffusion transition layer, a titanium nitride support layer and a molybdenum disulfide titanium nitride composite layer from bottom to top, the thickness of the titanium diffusion transition layer is 750nm, The thickness of the titanium nitride support layer is 650nm, and the thickness of the molybdenum disulfide titanium nitride composite layer is 1400nm.
[0043] A kind of preparation method of molybdenum disulfide titanium nitride composite thin film, the steps that its preparation method comprises are as follows:
[0044] (1) Open the equipment: put the carrier for preparing the film on the turntable in the vacuum chamber, so that the pressure of the vacuum chamber is 10 -2 Pa, start to heat up and keep the temperature at 135°C; continue to vacuumize to less than 6×10 -3Start the turntable, the turntable speed is 2 revs / min; the carrier for preparing the fil...
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Abstract
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