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Molybdenum disulfide titanium nitride composite film and preparation method thereof

A technology of molybdenum disulfide and composite film, applied in chemical instruments and methods, ion implantation plating, coating and other directions, can solve the problem of difficult long-term preservation of molybdenum disulfide, easy contact with air and water, poor adhesion and density, etc. problem, to achieve the effect of simple structure, simple production and low cost

Active Publication Date: 2014-10-01
徐州赛亿达电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Molybdenum disulfide has a good solid lubricant, which can greatly reduce the friction and wear of the workpiece surface. It is widely used in cutting tools, molds, mechanical transmission and other fields. However, pure molybdenum disulfide is difficult to store for a long time in the air. After contact with water , is easily oxidized to molybdenum trioxide, thereby reducing its lubricating effect; at present, most of the molybdenum disulfide composite films prepared in China adopt the method of electroless plating. In solvents and aqueous solutions, they are easy to contact with air and water during preparation. thin film, poor adhesion and density, it is difficult to ensure the quality of the film

Method used

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  • Molybdenum disulfide titanium nitride composite film and preparation method thereof

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Effect test

Embodiment 1

[0022] A molybdenum disulfide-titanium nitride composite film, the composite film respectively includes a titanium diffusion transition layer 1, a titanium nitride support layer 2 and a molybdenum disulfide titanium nitride composite layer 3 from bottom to top, and the thickness of the titanium diffusion transition layer is The thickness of the titanium nitride support layer is 500nm, and the thickness of the molybdenum disulfide titanium nitride composite layer is 1000nm.

[0023] A kind of preparation method of molybdenum disulfide titanium nitride composite thin film, the steps that its preparation method comprises are as follows:

[0024] (1) Open the equipment: put the carrier for preparing the film on the turntable in the vacuum chamber, so that the pressure of the vacuum chamber is 10 -2 Pa, start to heat up, and keep the temperature at 70°C; continue to vacuumize to less than 6×10 -3 Pagoda; Start the turntable, turntable speed 1 rev / min; The carrier that the present ...

Embodiment 2

[0032] A molybdenum disulfide-titanium nitride composite film, the composite film respectively includes a titanium diffusion transition layer, a titanium nitride support layer and a molybdenum disulfide titanium nitride composite layer from bottom to top, the thickness of the titanium diffusion transition layer is 1300nm, The thickness of the titanium nitride support layer is 800nm, and the thickness of the molybdenum disulfide titanium nitride composite layer is 1800nm.

[0033] A kind of preparation method of molybdenum disulfide titanium nitride composite thin film, the steps that its preparation method comprises are as follows:

[0034] (1) Open the equipment: put the carrier for preparing the film on the turntable in the vacuum chamber, so that the pressure of the vacuum chamber is 10 -2 Pa, start to heat up, and keep the temperature at 200°C; continue to vacuumize to less than 6×10 -3 Start the turntable, the turntable speed is 3 rev / min; the carrier for preparing the f...

Embodiment 3

[0042] A molybdenum disulfide-titanium nitride composite film, the composite film respectively includes a titanium diffusion transition layer, a titanium nitride support layer and a molybdenum disulfide titanium nitride composite layer from bottom to top, the thickness of the titanium diffusion transition layer is 750nm, The thickness of the titanium nitride support layer is 650nm, and the thickness of the molybdenum disulfide titanium nitride composite layer is 1400nm.

[0043] A kind of preparation method of molybdenum disulfide titanium nitride composite thin film, the steps that its preparation method comprises are as follows:

[0044] (1) Open the equipment: put the carrier for preparing the film on the turntable in the vacuum chamber, so that the pressure of the vacuum chamber is 10 -2 Pa, start to heat up and keep the temperature at 135°C; continue to vacuumize to less than 6×10 -3Start the turntable, the turntable speed is 2 revs / min; the carrier for preparing the fil...

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Abstract

The invention relates to a molybdenum disulfide / titanium nitride composite film which respectively comprises a titanium diffusion transition layer, a titanium nitride supporting layer and a molybdenum disulfide / titanium nitride composite layer from bottom to top, wherein the thickness of the titanium diffusion transition layer is 250-1300nm, the thickness of the titanium nitride supporting layer is 500-800nm, and the thickness of the molybdenum disulfide / titanium nitride composite layer is 1000-1800nm. The invention has the advantages of simple structure, scientific and reasonable design, simple preparation process and low cost. The diamond-like film prepared by the diamond-like film preparation method has the advantages of strong binding force, favorable toughness and high density.

Description

technical field [0001] The invention belongs to the field of diamond-like carbon, in particular to a molybdenum disulfide titanium nitride composite film and a preparation method thereof. Background technique [0002] Molybdenum disulfide has a good solid lubricant, which can greatly reduce the friction and wear of the workpiece surface. It is widely used in cutting tools, molds, mechanical transmission and other fields. However, pure molybdenum disulfide is difficult to store for a long time in the air. After contact with water , is easily oxidized to molybdenum trioxide, thereby reducing its lubricating effect; at present, most of the molybdenum disulfide composite films prepared in China adopt the method of electroless plating. In solvents and aqueous solutions, they are easy to contact with air and water during preparation. The thin film has poor adhesion and density, and it is difficult to guarantee the quality of the film. Contents of the invention [0003] The purp...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B32B15/04B32B9/04C23C14/35C23C14/14C23C14/06
Inventor 甄洪宾
Owner 徐州赛亿达电子科技有限公司