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A detection method of piezoelectric coefficient

A piezoelectric coefficient and detection method technology, applied in the direction of measuring devices, measuring electrical variables, instruments, etc., to achieve the effects of reducing deviation, reducing needle tip deflection, and improving accuracy

Inactive Publication Date: 2014-10-15
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The purpose of the present invention is to solve the above-mentioned problems that existing atomic force microscope systems detect the piezoelectric coefficient of piezoelectric materials, and propose a piezoelectric coefficient detection method

Method used

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  • A detection method of piezoelectric coefficient
  • A detection method of piezoelectric coefficient
  • A detection method of piezoelectric coefficient

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Embodiment Construction

[0025] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0026] The piezoelectric coefficient detection method of the present invention specifically comprises the following steps:

[0027] S1. Place the piezoelectric material with the bottom electrode to be tested on the sample stage of the atomic force microscope, and touch the area of ​​the sample to be tested with a conductive probe.

[0028] S2. Every once in a while, load a DC pulse Vdc between the tip of the atomic microscope and the piezoelectric material to be tested;

[0029] If the piezoelectric material to be tested is a nonlinear piezoelectric material, the magnitude of the loaded DC pulse satisfies:

[0030] The size of the DC pulses in adjacent intervals is firstly increased and then decreased, that is, it increases sequentially from the preset minimum value until it increases to the preset maximum value, and then decreases sequentiall...

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Abstract

The invention discloses a piezoelectric coefficient detection method. After the method of the present invention adopts the loading pulse direct current voltage, utilizes the alternating current voltage signal to test the micro-area piezoelectric coefficient of the sample, can test the piezoelectric coefficient of the nonlinear piezoelectric sample; When testing the piezoelectric coefficient of the material, stop giving the sample to be tested Apply a DC voltage, and use the applied AC voltage to detect the piezoelectric coefficient of the sample to be tested under each quasi-static DC bias voltage, that is, each DC pulse, so as to avoid the accumulation of charges on the surface of the sample to be tested due to the application of a DC electric field during the test, This causes the probe cantilever to generate an induced potential, thereby avoiding the deviation of the position of the probe cantilever caused by the interaction potential between the electric field of the needle tip and the surface of the sample to be tested, thereby eliminating the deviation of the optical circuit of the atomic force microscope and improving the test accuracy.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric performance testing of piezoelectric materials, and in particular relates to a detection method for measuring piezoelectric coefficients by using an inverse piezoelectric effect. Background technique [0002] The piezoelectric effect means that the crystal generates bound charges under the action of applied pressure, and the bound charges are proportional to the magnitude of the applied pressure (ie, the positive piezoelectric effect) or mechanically deformed under the action of an applied electric field (ie, the inverse piezoelectric effect). The phenomenon. Materials with piezoelectric effect are collectively referred to as piezoelectric materials, and ferroelectric materials are one type of piezoelectric materials. The charge generated by a piezoelectric material under the action of unit pressure or the amount of deformation generated under the action of unit voltage is called the piezoe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R29/22
Inventor 韩若冰曾慧中黄文林媛
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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