Active target and method for calibrating beam-target coupling sensor on line by using same
A calibration method and target coupling technology, applied in the direction of optical devices, instruments, measuring devices, etc., can solve the problems of inability to calibrate sensor sensor parameters, poor beam-target coupling accuracy, etc., and achieve the effect of improving convenience and calibration accuracy
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specific Embodiment approach 1
[0028] Specific implementation mode 1. Combination figure 1 Describe this embodiment in detail, the active target described in this embodiment, it comprises target rod 1, positioning mark 2, support seat 3, first circuit board 4, second circuit board 5, upper road CCD image sensor 6, lower road CCD Image sensor 7, first housing 8 and second housing 9,
[0029] One side of the support base 3 is fixed with a target rod 1, the support base 3 and the target rod 1 are coaxially connected, the inside of the support base 3 near the side of the target rod 1 is fixed with a positioning mark 2, and the other side of the support base 3 The first shell 8 and the second shell 9 are respectively fixedly installed on the sides, and the first shell 8 and the second shell 9 are distributed symmetrically about the coaxial line of the support base 3 and the target rod 1,
[0030] The first circuit board 4 and the upper road CCD image sensor 6 are located in the inside of the first housing 8, t...
specific Embodiment approach 2
[0034] Specific Embodiment 2. The difference between this embodiment and the active target described in Specific Embodiment 1 is that the width ranges of the cross lines of the cross marks drawn by laser on the upper CCD image sensor 6 and the lower CCD image sensor 7 are both : 8μm~12μm.
specific Embodiment approach 3
[0035] Specific embodiment three, combine figure 2 Describe this embodiment in detail. This embodiment is based on the online calibration method using the active target-to-beam-target coupling sensor described in the first embodiment.
[0036] The upper monitoring unit of the beam target coupling sensor comprises an upper CCD image sensor 10, an upper microscope objective lens 11 and an upper laser reflector 12, and the lower monitoring unit of the beam target coupling sensor comprises a lower CCD image sensor 17, a lower laser reflector 18 and a lower laser reflector 12. The microscope objective lens 19, the upper monitoring unit and the lower monitoring unit are used to detect the imaging of the target, the middle and upper part of the monitoring unit of the beam target coupling sensor includes the middle and upper road CCD image sensor 13 and the middle and upper microscope objective lens 14, the middle and lower part of the beam target coupling sensor The monitoring unit ...
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