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Moire fringe high-power subdivision method based on less spatial points and equipment

A technology of moiré fringes and space points, which is applied to measuring devices, instruments, optical devices, etc., can solve problems such as unsatisfactory results, and achieve the effect of high subdivision number, less calculation amount, and less calculation amount

Inactive Publication Date: 2012-09-19
SHENYANG POLYTECHNIC UNIV
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Problems solved by technology

[0004] Purpose of the invention: The present invention provides a method of high-magnification subdivision of Moiré fringes based on a small number of spatial points, and its purpose is to solve the problem of unsatisfactory effects of previous methods

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  • Moire fringe high-power subdivision method based on less spatial points and equipment
  • Moire fringe high-power subdivision method based on less spatial points and equipment
  • Moire fringe high-power subdivision method based on less spatial points and equipment

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specific Embodiment approach

[0045] detailed description: Below in conjunction with accompanying drawing, patent of the present invention is described further:

[0046] Such as figure 1 Shown is the moire fringe high-magnification subdivision device based on a small number of spatial points of the present invention, in which the grating sensor is connected to the instrument amplifier, the instrument amplifier is connected to the anti-aliasing filter, and the anti-aliasing filter is connected to the analog-to-digital converter , the analog-to-digital converter is connected to the SOPC system based on FPGA; the Moiré fringe high-magnification subdivision device based on a small number of spatial points also includes a keyboard and a display unit, and the keyboard and display unit are connected to the SOPC system based on FPGA.

[0047] The FPGA-based SOPC system is equipped with a parallel data acquisition unit, a parallel data processing unit, and a synchronous control pulse unit; To the parallel data ...

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Abstract

The invention discloses a novel moire fringe high-power subdivision method based on less spatial points, which is applicable to wide-range displacement quick and precise measurement, positioning and control. The position of a grating is determined through the four-way spatial signals output by a grating sensor at a certain moment, and the total displacement is obtained by accumulating the position differences of the two neighboring moments; and the high-resolution high-power subdivision is obtained by adopting the high-precision high-speed data collecting system and the space less point subdivision algorithm. The method fully utilizes the cyclicity and sine property of the moire fringe, adopts the FPGA (Field Programmable Gate Array) to realize algorithm, has the characteristics of less calculation, high speed and high subdividing number, and can solve the contradictory problems in grating wide-range precise displacement measurement and control of high resolution, high speed and wide range.

Description

technical field [0001] The invention mainly relates to a grating moiré fringe subdivision method and a precision displacement measurement device in precise displacement measurement, and proposes a grating moiré fringe high-magnification subdivision method capable of achieving nanometer resolution. Background technique [0002] Grating Moiré fringe subdivision and displacement measurement [0003] The most well-known foreign organization for researching stripes and their application in grating sensors is HEIDENHAIN in Germany. Its high-quality technology and products are realized on the basis of exquisite photolithography technology, high-quality materials and advanced experimental production conditions. Its products have reached nanoscale , but banned domestically. British RENISHAW is also an influential grating digital display enterprise in the world. The grating system with innovative non-contact optical structure developed by it has strong anti-pollution ability while a...

Claims

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Application Information

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IPC IPC(8): G01B11/02
Inventor 常丽
Owner SHENYANG POLYTECHNIC UNIV
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