Valveless piezoelectric pump with axisymmetric logarithmic spiral pipe
A valveless piezoelectric pump and logarithmic screw technology, applied in the direction of pumps, pump components, variable capacity pump components, etc., can solve the problems of energy consumption reduction, unfavorable integration and miniaturization, complex structure, etc., and achieve one-way Effects of reduced pressure loss, ease of integration and miniaturization, and improved volumetric efficiency
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[0020] Such as Figure 1-3 , the present invention includes a pump body 6, a pump cover 7 and a piezoelectric vibrator 8, the pump body 6 and the pump cover 7 are electrostatically bonded together, the piezoelectric vibrator 8 is fixed directly above the pump cover 7 by an adhesive, and the pump cover 7 The pump inlet 1 and the pump outlet 2 are processed on the top, and the pump inlet 1 and the pump outlet 2 are respectively connected to the inlet pipe and the outlet pipe; the MEMS processing technology is used to process two inlet flow pipes 4 with the same structure on the pump body 6 and the pump cover 7 , outlet flow tube 5 and a cylindrical pump cavity 3, wherein the pump cavity 3 is located between the inlet flow tube 4 and the outlet flow tube 5, and the inlet flow tube 4, the outlet flow tube 5 and the pump cavity 3 are coaxial in the horizontal direction , the inlet flow pipe 4 and the outlet flow pipe 5 communicate with the pump chamber 3 respectively, and the three...
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